| Filed On | Filing |
|---|---|
| 12 Feb 2019 | SC 13G/A |
| 08 Feb 2019 | SCHEDULE 13G/A |
| 31 Jan 2019 | SC 13G/A |
| 09 Feb 2018 | SCHEDULE 13G/A |
| 19 Jan 2018 | SC 13G/A |
| 01 Feb 2017 | SC 13G/A |
| 17 Jan 2017 | SC 13G/A |
| 04 Nov 2016 | SC 13G/A |
| 10 May 2016 | SC 13G/A |
| 12 Feb 2016 | SC 13G/A |
| 02 Feb 2016 | RUDOLPH TECHNOLOGIES INC |
| 27 Jan 2016 | SC 13G/A |
| 27 Jan 2016 | SC 13G/A |
| 17 Feb 2015 | SC 13G/A |
| 12 Feb 2015 | SC 13G/A |
| 10 Feb 2015 | SCHEDULE 13G/A |
| 05 Feb 2015 | SCHEDULE 13G/A |
| 30 Jan 2015 | RUDOLPH TECHNOLOGIES INC |
| 21 Jan 2015 | SC 13G/A |
| 15 Jan 2015 | SC 13G/A |
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