| Filed On | Filing |
|---|---|
| 17 Nov 2021 | SC 13D |
| 22 Feb 2019 | SC 13D |
| 07 May 2012 | SCHEDULE 13D |
| 21 Aug 2002 | SCHEDULE 13-D |
| 09 Jul 2002 | SCHEDULE 13D |
| 04 Sep 1998 | SCHEDULE 13D |
| 02 Sep 1998 | SCHEDULE 13D FILED FOR AMTECH CORPORATION |
| 21 May 1998 | SCHEDULE 13D |
| 13 Nov 1997 | SCHED 13D |
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