| Filed On | Filing |
|---|---|
| 13 Jun 2019 | Form 3/A: Baumgartner Jeffrey W, VP of R&D |
| 14 Sep 2015 | Form 3/A: Fluke Bradley J, VP & GM, MEMS Division |
| 10 Mar 2005 |
Form 3/A: Benson JoDee, VP Corp Communications and HR
Holds 4,564 shares of Common Stock |
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