| Filed On | Filing |
|---|---|
| 11 Mar 2016 | 10-K |
| 12 Mar 2015 | 10-K |
| 17 Mar 2014 | 10-K |
| 15 Mar 2013 | 10-K |
| 22 Feb 2012 | 10-K |
| 11 Mar 2011 | 10-K |
| 05 Mar 2010 | 10-K |
| 06 Mar 2009 | 10-K |
| 25 Feb 2008 | 10-K |
| 02 Mar 2007 | 10-K |
| 03 May 2006 | FORM 10-K |
| 23 Mar 2005 | 10-K |
| 15 Mar 2004 | 10-K |
| 31 Mar 2003 | MATTSON TECHNOLOGY 10-K 12/31/02 |
| 01 Apr 2002 | 10-K |
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