| Filed On | Filing |
|---|---|
| 14 Feb 2017 | SC 13G/A |
| 12 Feb 2016 | SC 13G/A |
| 11 Feb 2016 | SC 13G/A |
| 10 Jul 2015 | SC 13G/A |
| 10 Jul 2013 | SC 13G/A |
| 14 Feb 2012 | MATT |
| 08 Jul 2011 | SC 13G/A |
| 14 Feb 2011 | MATTSON |
| 12 Feb 2010 | SC 13G/A |
| 12 Feb 2010 | SC 13G/A |
| 12 Feb 2010 | MTSN AS OF 12/31/2009 |
| 11 Feb 2010 | SCHEDULE 13G/A |
| 10 Sep 2009 | DOC ONE |
| 09 Mar 2009 | MATTSON TECHNOLOGY |
| 17 Feb 2009 | DOC ONE |
| 17 Feb 2009 | SC 13G/A |
| 13 Feb 2009 | MTSN AS OF 12/31/08 |
| 09 Feb 2009 | SCHEDULE 13G/A |
| 10 Nov 2008 | DOC ONE |
| 14 Feb 2008 | SC 13G/A |
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