| Filed On | Filing |
|---|---|
| 14 Mar 2018 | DEF 14A |
| 18 Aug 2017 | DEF 14A |
| 25 Apr 2017 | DEFINITIVE PROXY |
| 05 Dec 2016 | DEFINITVE NOTICE AND PROXY STATEMENT |
| 29 Jul 2014 | COLLABRX, INC DEF 14A 9-25-2014 |
| 29 Jul 2013 | COLLABRX, INC DEF 14A 9-26-2013 |
| 15 Aug 2012 | TEGAL CORP DEF 14A 9-25-2012 |
| 27 Feb 2012 | TEGAL CORPORATION DEF 14A 3-27-2012 |
| 23 May 2011 | DEF 14A |
| 17 Feb 2011 | DEF 14A |
| 24 Feb 2010 | DEF 14A |
| 29 Jul 2008 | DEF_14A_2008_PROXY |
| 12 Sep 2007 | TEGAL_FROM_DEF_14A_9-12-2007 |
| 30 Jul 2007 | TEGAL_FY2007_PROXY_DEF |
| 20 Jun 2006 | DEF 14A |
| 01 Aug 2005 | DEF 14A |
| 29 Jul 2004 | DEF 14A |
| 12 Aug 2003 | DEF 14A |
| 03 Apr 2003 | DEFINITIVE 14A |
| 26 Sep 2002 | DEFINITIVE PROXY STATEMENT |
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