| Filed On | Filing |
|---|---|
| 12 Feb 2018 | PRE 14A |
| 04 Oct 2017 | PRE 14A |
| 19 Jul 2017 | PRE 14A |
| 05 Apr 2017 | PRE 14A |
| 23 Nov 2016 | PRELIMINARY PROXY |
| 03 Aug 2012 | TEGAL CORPORATION PRE14A 9-25-2012 |
| 13 May 2011 | PRE 14A |
| 30 Jul 2007 | TEGAL_FY2007_PROXY_STATEMENT |
| 07 Jun 2006 | PRE 14A |
| 19 Jul 2005 | PRE 14A |
| 09 Jul 2003 | PRE 14A |
| 07 Mar 2003 | PRELIMINARY PROXY STATEMENT |
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