| Filed On | Filing |
|---|---|
| 28 Feb 2024 | 10-K/A |
| 12 Mar 2015 | 10-K/A |
| 29 Jun 2009 | 10-K/A |
| 29 Sep 2008 | 10-K/A |
| 25 Jun 2007 | 10-K/A |
| 29 Jun 2006 | AMENDMENT TO ANNUAL REPORT PURSUANT TO SECTION 13 AND 15(D) |
| 29 Jun 2005 | 10-K/A |
| 29 Jun 2004 | 10-K/A |
| 30 Jun 2003 | AXCELIS TECHNOLOGIES, INC. FORM 10-K/A |
| 28 Jun 2002 | AXCELIS TECHNOLOGIES, INC. |
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