| Filed On | Filing |
|---|---|
| 27 Oct 2022 | AXCELIS TECHNOLOGIES, INC. |
| 13 Feb 2018 | 2017 13-G FILING |
| 08 Feb 2018 | SC 13G |
| 10 Jan 2018 | SEC SCHEDULE 13G |
| 09 Feb 2017 | SCHEDULE 13G |
| 09 Feb 2017 | 13-G FILING |
| 10 Feb 2016 | 2015 13-G FILING |
| 30 Jun 2015 | AXCELIS TECHNOLOGIES, INC. |
| 03 Feb 2015 | DECEMBER 31, 2014 13-G FILING |
| 07 May 2014 | SC 13G |
| 07 Feb 2014 | 13-G FILING |
| 13 Feb 2013 | 13-G FILING AS OF DECEMBER 31, 2012 |
| 13 Feb 2012 | 13-G FILING AS OF DECEMBER 31, 2011 |
| 11 Feb 2011 | 13G FILING DECEMBER 31, 2010 |
| 02 Feb 2011 | SC 13G |
| 12 Feb 2010 | SC 13G |
| 11 Feb 2010 | 13G FILING AS OF DECEMBER 31, 2009 |
| 25 Feb 2009 | CONVERT FROM 13D TO 13G |
| 11 Feb 2009 | 13-G FILING FOR DECEMBER 31, 2008 |
| 05 Feb 2009 | SC 13G |
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