$ASYS
AMTECH SYSTEMS INC Stock $asys

$asys Overview Financials Valuation SEC Filings Company Website

2021 Q3 Form 10-K Financial Statement

#000095017021004729 Filed on November 17, 2021

Income Statement

Concept	2021 Q3	2021	2020 Q3
Revenue	$24.34M	$85.21M	$15.08M
YoY Change	61.36%	30.16%	-25.23%
Cost Of Revenue	$15.13M	$50.68M	$10.13M
YoY Change	49.41%	23.53%	-12.81%
Gross Profit	$9.211M	$34.53M	$4.958M
YoY Change	85.78%	41.28%	-42.08%
Gross Profit Margin	37.84%	40.53%	32.87%
Selling, General & Admin	$6.558M	$24.74M	$5.263M
YoY Change	24.61%	15.62%	-14.09%
% of Gross Profit	71.2%	71.65%	106.15%
Research & Development		$5.979M
YoY Change		62.08%
% of Gross Profit		17.32%
Depreciation & Amortization	$360.0K	$1.398M	$330.0K
YoY Change	9.09%	11.13%	-19.51%
% of Gross Profit	3.91%	4.05%	6.66%
Operating Expenses	$6.558M	$30.72M	$5.263M
YoY Change	24.61%	22.45%	-14.09%
Operating Profit	$1.296M	$3.725M	-$1.181M
YoY Change	-209.74%	-868.04%	-171.45%
Interest Expense	$34.00K	-$313.0K	-$350.0K
YoY Change	-109.71%	-256.5%	-202.94%
% of Operating Profit	2.62%	-8.4%
Other Income/Expense, Net	$46.00K	-$291.0K	-$350.0K
YoY Change	-113.14%	-279.63%	-202.64%
Pretax Income	$1.342M	$3.434M	-$1.531M
YoY Change	-187.66%	-210.21%	-176.78%
Income Tax	$676.0K	$1.926M	$494.0K
% Of Pretax Income	50.37%	56.09%
Net Earnings	$666.0K	$1.508M	-$2.025M
YoY Change	-132.89%	-109.59%	-353.76%
Net Earnings / Revenue	2.74%	1.77%	-13.42%
Basic Earnings Per Share	$0.05	$0.11	-$0.14
Diluted Earnings Per Share	$0.05	$0.11	-$0.14
COMMON SHARES
Basic Shares Outstanding	14.19M	14.19M	14.05M
Diluted Shares Outstanding	14.39M	14.34M	14.05M

Balance Sheet

Concept	2021 Q3	2021	2020 Q3
SHORT-TERM ASSETS
Cash & Short-Term Investments	$32.84M	$32.84M	$45.10M
YoY Change	-27.19%	-27.19%	-14.91%
Cash & Equivalents	$32.84M	$32.84M	$45.07M
Short-Term Investments
Other Short-Term Assets	$2.407M	$2.407M	$1.617M
YoY Change	48.86%	50.44%	-18.78%
Inventory	$22.08M	$22.08M	$17.28M
Prepaid Expenses
Receivables	$22.50M	$22.50M	$11.24M
Other Receivables	$1.046M	$1.046M	$1.400M
Total Short-Term Assets	$80.87M	$80.87M	$76.57M
YoY Change	5.61%	5.57%	-29.28%
LONG-TERM ASSETS
Property, Plant & Equipment	$14.08M	$22.73M	$12.00M
YoY Change	17.41%	32.92%	17.4%
Goodwill	$11.17M		$6.633M
YoY Change	68.37%		0.0%
Intangibles
YoY Change
Long-Term Investments
YoY Change
Other Assets	$661.0K	$1.292M	$602.0K
YoY Change	9.8%	7.67%	23.61%
Total Long-Term Assets	$36.05M	$36.05M	$25.53M
YoY Change	41.2%	41.36%	40.22%
TOTAL ASSETS
Total Short-Term Assets	$80.87M	$80.87M	$76.57M
Total Long-Term Assets	$36.05M	$36.05M	$25.53M
Total Assets	$116.9M	$116.9M	$102.1M
YoY Change	14.51%	14.51%	-19.28%
SHORT-TERM LIABILITIES
YoY Change
Accounts Payable	$8.229M	$8.229M	$2.676M
YoY Change	207.51%	204.78%	-38.78%
Accrued Expenses	$903.0K	$4.799M	$627.0K
YoY Change	44.02%	49.97%	-50.78%
Deferred Revenue	$1.600M		$1.224M
YoY Change	30.72%		-11.18%
Short-Term Debt	$0.00	$0.00	$0.00
YoY Change
Long-Term Debt Due	$396.0K	$457.0K	$380.0K
YoY Change	4.21%	14.25%	2.43%
Total Short-Term Liabilities	$15.11M	$15.11M	$7.477M
YoY Change	102.07%	101.45%	-75.6%
LONG-TERM LIABILITIES
Long-Term Debt	$4.402M	$4.512M	$4.798M
YoY Change	-8.25%	-6.0%	-7.34%
Other Long-Term Liabilities	$102.0K	$11.66M	$8.300M
YoY Change	-98.77%	40.46%	159.38%
Total Long-Term Liabilities	$4.504M	$16.17M	$4.798M
YoY Change	-6.13%	23.44%	-7.34%
TOTAL LIABILITIES
Total Short-Term Liabilities	$15.11M	$15.11M	$7.477M
Total Long-Term Liabilities	$4.504M	$16.17M	$4.798M
Total Liabilities	$31.28M	$31.28M	$20.58M
YoY Change	51.99%	51.84%	-47.27%
SHAREHOLDERS EQUITY
Retained Earnings	-$40.90M		-$42.41M
YoY Change	-3.56%		59.7%
Common Stock	$143.0K		$141.0K
YoY Change	1.42%		-1.4%
Preferred Stock
YoY Change
Treasury Stock (at cost)
YoY Change
Treasury Stock Shares
Shareholders Equity	$85.63M	$85.63M	$81.52M
YoY Change
Total Liabilities & Shareholders Equity	$116.9M	$116.9M	$102.1M
YoY Change	14.51%	14.51%	-19.28%

Cashflow Statement

Concept	2021 Q3	2021	2020 Q3
OPERATING ACTIVITIES
Net Income	$666.0K	$1.508M	-$2.025M
YoY Change	-132.89%	-109.59%	-353.76%
Depreciation, Depletion And Amortization	$360.0K	$1.398M	$330.0K
YoY Change	9.09%	11.13%	-19.51%
Cash From Operating Activities	-$3.190M	-$5.962M	-$670.0K
YoY Change	376.12%	258.29%	168.0%
INVESTING ACTIVITIES
Capital Expenditures	-$2.222M	$3.012M	-$1.820M
YoY Change	22.09%	12.56%	1037.5%
Acquisitions		$5.082M
YoY Change
Other Investing Activities	$0.00	-$5.082M	$0.00
YoY Change		-48.87%
Cash From Investing Activities	-$2.222M	-$8.094M	-$1.820M
YoY Change	22.09%	-35.84%	970.59%
FINANCING ACTIVITIES
Cash Dividend Paid
YoY Change
Common Stock Issuance & Retirement, Net
YoY Change
Debt Paid & Issued, Net		$380.0K
YoY Change		0.26%
Cash From Financing Activities	302.0K	1.166M	-10.00K
YoY Change	-3120.0%	-177.63%	-83.33%
NET CHANGE
Cash From Operating Activities	-3.190M	-5.962M	-670.0K
Cash From Investing Activities	-2.222M	-8.094M	-1.820M
Cash From Financing Activities	302.0K	1.166M	-10.00K
Net Change In Cash	-5.110M	-12.23M	-2.500M
YoY Change	104.4%	-13.01%	420.83%
FREE CASH FLOW
Cash From Operating Activities	-$3.190M	-$5.962M	-$670.0K
Capital Expenditures	-$2.222M	$3.012M	-$1.820M
Free Cash Flow	-$968.0K	-$8.974M	$1.150M
YoY Change	-184.17%	106.77%	-1377.78%

Facts In Submission

Frame	Concept Type	Concept / XBRL Key	Value
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CY2020Q3	us-gaap	Finance Lease Right Of Use Asset Statement Of Financial Position Extensible List FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList	http://fasb.org/us-gaap/2021-01-31#PropertyPlantAndEquipmentNet
CY2021	dei	Current Fiscal Year End Date CurrentFiscalYearEndDate	--09-30
CY2020Q3	us-gaap	Operating Lease Liability Noncurrent Statement Of Financial Position Extensible List OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList	http://amtechsystems.com/20210930#FinanceAndOperatingLeaseLiabilityNoncurrent
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CY2021	dei	Document Type DocumentType	10-K
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CY2021	dei	Document Period End Date DocumentPeriodEndDate	2021-09-30
CY2021	dei	Document Fiscal Year Focus DocumentFiscalYearFocus	2021
CY2021	dei	Document Transition Report DocumentTransitionReport	false
CY2021	dei	Entity File Number EntityFileNumber	0-11412
CY2021	dei	Entity Registrant Name EntityRegistrantName	AMTECH SYSTEMS, INC.
CY2021	dei	Entity Incorporation State Country Code EntityIncorporationStateCountryCode	AZ
CY2021	dei	Entity Tax Identification Number EntityTaxIdentificationNumber	86-0411215
CY2021	dei	Entity Address Address Line1 EntityAddressAddressLine1	131 South Clark Drive
CY2021	dei	Entity Address City Or Town EntityAddressCityOrTown	Tempe
CY2021	dei	Entity Address State Or Province EntityAddressStateOrProvince	AZ
CY2021	dei	Entity Address Postal Zip Code EntityAddressPostalZipCode	85281
CY2021	dei	City Area Code CityAreaCode	480
CY2021	dei	Local Phone Number LocalPhoneNumber	967-5146
CY2021	dei	Security12b Title Security12bTitle	Common Stock, par value $0.01 per share
CY2021	dei	Trading Symbol TradingSymbol	ASYS
CY2021	dei	Security Exchange Name SecurityExchangeName	NASDAQ
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CY2021	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	0.11
CY2020	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	-1.11
CY2019	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	-0.36
CY2021	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	0.11
CY2020	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	-0.28
CY2019	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	-0.36
CY2019	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	0.22
CY2020	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Diluted Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerDilutedShare	-0.83
CY2019	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Diluted Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerDilutedShare	-0.58
CY2021	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	0.11
CY2020	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	-1.11
CY2021	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14189000
CY2020	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14159000
CY2019	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14240000
CY2021	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14340000
CY2020	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14159000
CY2019	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14275000
CY2021	us-gaap	Profit Loss ProfitLoss	1508000
CY2020	us-gaap	Profit Loss ProfitLoss	-15723000
CY2019	us-gaap	Profit Loss ProfitLoss	-5162000
CY2021	us-gaap	Other Comprehensive Income Foreign Currency Transaction And Translation Gain Loss Arising During Period Net Of Tax OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax	660000
CY2020	us-gaap	Other Comprehensive Income Foreign Currency Transaction And Translation Gain Loss Arising During Period Net Of Tax OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax	1790000
CY2019	us-gaap	Other Comprehensive Income Foreign Currency Transaction And Translation Gain Loss Arising During Period Net Of Tax OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationGainLossArisingDuringPeriodNetOfTax	-1746000
CY2020	us-gaap	Other Comprehensive Income Loss Foreign Currency Transaction And Translation Reclassification Adjustment From Aoci Realized Upon Sale Or Liquidation Net Of Tax OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationReclassificationAdjustmentFromAOCIRealizedUponSaleOrLiquidationNetOfTax	-8797000
CY2019	us-gaap	Other Comprehensive Income Loss Foreign Currency Transaction And Translation Reclassification Adjustment From Aoci Realized Upon Sale Or Liquidation Net Of Tax OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationReclassificationAdjustmentFromAOCIRealizedUponSaleOrLiquidationNetOfTax	-487000
CY2021	us-gaap	Comprehensive Income Net Of Tax ComprehensiveIncomeNetOfTax	2168000
CY2020	us-gaap	Comprehensive Income Net Of Tax ComprehensiveIncomeNetOfTax	-5136000
CY2019	us-gaap	Comprehensive Income Net Of Tax ComprehensiveIncomeNetOfTax	-6421000
CY2018Q3	us-gaap	Stockholders Equity Including Portion Attributable To Noncontrolling Interest StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest	93090000
CY2019	us-gaap	Profit Loss ProfitLoss	-5162000
CY2019	us-gaap	Other Comprehensive Income Loss Foreign Currency Transaction And Translation Adjustment Net Of Tax OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax	-1259000
CY2019	us-gaap	Adjustments To Additional Paid In Capital Sharebased Compensation Requisite Service Period Recognition Value AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue	573000
CY2019	us-gaap	Stock Issued During Period Value Stock Options Exercised StockIssuedDuringPeriodValueStockOptionsExercised	210000
CY2019Q3	us-gaap	Stockholders Equity Including Portion Attributable To Noncontrolling Interest StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest	87452000
CY2020	us-gaap	Profit Loss ProfitLoss	-15723000
CY2020	us-gaap	Other Comprehensive Income Loss Foreign Currency Transaction And Translation Adjustment Net Of Tax OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax	10587000
CY2020	us-gaap	Adjustments To Additional Paid In Capital Sharebased Compensation Requisite Service Period Recognition Value AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue	326000
CY2020	us-gaap	Treasury Stock Value Acquired Cost Method TreasuryStockValueAcquiredCostMethod	2000000
CY2020	us-gaap	Stock Issued During Period Value Stock Options Exercised StockIssuedDuringPeriodValueStockOptionsExercised	877000
CY2020Q3	us-gaap	Stockholders Equity Including Portion Attributable To Noncontrolling Interest StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest	81519000
CY2021	us-gaap	Profit Loss ProfitLoss	1508000
CY2021	us-gaap	Other Comprehensive Income Loss Foreign Currency Transaction And Translation Adjustment Net Of Tax OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax	660000
CY2021	us-gaap	Adjustments To Additional Paid In Capital Sharebased Compensation Requisite Service Period Recognition Value AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue	401000
CY2021	us-gaap	Stock Issued During Period Value Stock Options Exercised StockIssuedDuringPeriodValueStockOptionsExercised	1546000
CY2021Q3	us-gaap	Stockholders Equity Including Portion Attributable To Noncontrolling Interest StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest	85634000
CY2021	us-gaap	Profit Loss ProfitLoss	1508000
CY2020	us-gaap	Profit Loss ProfitLoss	-15723000
CY2019	us-gaap	Profit Loss ProfitLoss	-5162000
CY2021	us-gaap	Depreciation Depletion And Amortization DepreciationDepletionAndAmortization	1398000
CY2020	us-gaap	Depreciation Depletion And Amortization DepreciationDepletionAndAmortization	1258000
CY2019	us-gaap	Depreciation Depletion And Amortization DepreciationDepletionAndAmortization	1690000
CY2021	us-gaap	Inventory Write Down InventoryWriteDown	544000
CY2020	us-gaap	Inventory Write Down InventoryWriteDown	733000
CY2019	us-gaap	Inventory Write Down InventoryWriteDown	3193000
CY2021	us-gaap	Provision For Doubtful Accounts ProvisionForDoubtfulAccounts	44000
CY2020	us-gaap	Provision For Doubtful Accounts ProvisionForDoubtfulAccounts	24000
CY2019	us-gaap	Provision For Doubtful Accounts ProvisionForDoubtfulAccounts	1074000
CY2021	us-gaap	Deferred Income Taxes And Tax Credits DeferredIncomeTaxesAndTaxCredits	-65000
CY2020	us-gaap	Deferred Income Taxes And Tax Credits DeferredIncomeTaxesAndTaxCredits	218000
CY2019	us-gaap	Deferred Income Taxes And Tax Credits DeferredIncomeTaxesAndTaxCredits	220000
CY2021	us-gaap	Share Based Compensation ShareBasedCompensation	401000
CY2020	us-gaap	Share Based Compensation ShareBasedCompensation	326000
CY2019	us-gaap	Share Based Compensation ShareBasedCompensation	573000
CY2020	us-gaap	Gain Loss On Sale Of Business GainLossOnSaleOfBusiness	-13709000
CY2019	us-gaap	Gain Loss On Sale Of Business GainLossOnSaleOfBusiness	1614000
CY2021	us-gaap	Other Noncash Income Expense OtherNoncashIncomeExpense	-43000
CY2020	us-gaap	Other Noncash Income Expense OtherNoncashIncomeExpense	-55000
CY2019	us-gaap	Other Noncash Income Expense OtherNoncashIncomeExpense	-95000
CY2021	us-gaap	Increase Decrease In Accounts Receivable IncreaseDecreaseInAccountsReceivable	11023000
CY2020	us-gaap	Increase Decrease In Accounts Receivable IncreaseDecreaseInAccountsReceivable	-1359000
CY2019	us-gaap	Increase Decrease In Accounts Receivable IncreaseDecreaseInAccountsReceivable	-299000
CY2021	us-gaap	Increase Decrease In Inventories IncreaseDecreaseInInventories	5180000
CY2020	us-gaap	Increase Decrease In Inventories IncreaseDecreaseInInventories	913000
CY2019	us-gaap	Increase Decrease In Inventories IncreaseDecreaseInInventories	435000
CY2021	asys	Increase Decrease In Contract With Customer And Other Assets IncreaseDecreaseInContractWithCustomerAndOtherAssets	686000
CY2020	asys	Increase Decrease In Contract With Customer And Other Assets IncreaseDecreaseInContractWithCustomerAndOtherAssets	-324000
CY2019	asys	Increase Decrease In Contract With Customer And Other Assets IncreaseDecreaseInContractWithCustomerAndOtherAssets	-12847000
CY2021	us-gaap	Increase Decrease In Accounts Payable IncreaseDecreaseInAccountsPayable	5472000
CY2020	us-gaap	Increase Decrease In Accounts Payable IncreaseDecreaseInAccountsPayable	-3620000
CY2019	us-gaap	Increase Decrease In Accounts Payable IncreaseDecreaseInAccountsPayable	-1787000
CY2021	us-gaap	Increase Decrease In Accrued Income Taxes Payable IncreaseDecreaseInAccruedIncomeTaxesPayable	353000
CY2020	us-gaap	Increase Decrease In Accrued Income Taxes Payable IncreaseDecreaseInAccruedIncomeTaxesPayable	-2701000
CY2019	us-gaap	Increase Decrease In Accrued Income Taxes Payable IncreaseDecreaseInAccruedIncomeTaxesPayable	-3011000
CY2021	asys	Increase Decrease In Accrued And Other Liabilities IncreaseDecreaseInAccruedAndOtherLiabilities	829000
CY2020	asys	Increase Decrease In Accrued And Other Liabilities IncreaseDecreaseInAccruedAndOtherLiabilities	4658000
CY2019	asys	Increase Decrease In Accrued And Other Liabilities IncreaseDecreaseInAccruedAndOtherLiabilities	-6876000
CY2021	us-gaap	Increase Decrease In Contract With Customer Liability IncreaseDecreaseInContractWithCustomerLiability	400000
CY2020	us-gaap	Increase Decrease In Contract With Customer Liability IncreaseDecreaseInContractWithCustomerLiability	-1371000
CY2019	us-gaap	Increase Decrease In Contract With Customer Liability IncreaseDecreaseInContractWithCustomerLiability	-933000
CY2021	us-gaap	Net Cash Provided By Used In Operating Activities NetCashProvidedByUsedInOperatingActivities	-5962000
CY2020	us-gaap	Net Cash Provided By Used In Operating Activities NetCashProvidedByUsedInOperatingActivities	-1664000
CY2019	us-gaap	Net Cash Provided By Used In Operating Activities NetCashProvidedByUsedInOperatingActivities	173000
CY2021	us-gaap	Payments To Acquire Property Plant And Equipment PaymentsToAcquirePropertyPlantAndEquipment	3012000
CY2020	us-gaap	Payments To Acquire Property Plant And Equipment PaymentsToAcquirePropertyPlantAndEquipment	2676000
CY2019	us-gaap	Payments To Acquire Property Plant And Equipment PaymentsToAcquirePropertyPlantAndEquipment	714000
CY2020	asys	Cash Disposed Of In Divestiture Of Consolidated Subsidiaries CashDisposedOfInDivestitureOfConsolidatedSubsidiaries	9940000
CY2019	asys	Cash Disposed Of In Divestiture Of Consolidated Subsidiaries CashDisposedOfInDivestitureOfConsolidatedSubsidiaries	1112000
CY2021	us-gaap	Payments To Acquire Businesses Net Of Cash Acquired PaymentsToAcquireBusinessesNetOfCashAcquired	5082000
CY2021	us-gaap	Net Cash Provided By Used In Investing Activities NetCashProvidedByUsedInInvestingActivities	-8094000
CY2020	us-gaap	Net Cash Provided By Used In Investing Activities NetCashProvidedByUsedInInvestingActivities	-12616000
CY2019	us-gaap	Net Cash Provided By Used In Investing Activities NetCashProvidedByUsedInInvestingActivities	-1826000
CY2021	us-gaap	Proceeds From Stock Options Exercised ProceedsFromStockOptionsExercised	1546000
CY2020	us-gaap	Proceeds From Stock Options Exercised ProceedsFromStockOptionsExercised	877000
CY2019	us-gaap	Proceeds From Stock Options Exercised ProceedsFromStockOptionsExercised	210000
CY2020	us-gaap	Payments For Repurchase Of Common Stock PaymentsForRepurchaseOfCommonStock	2000000
CY2021	us-gaap	Repayments Of Long Term Debt RepaymentsOfLongTermDebt	380000
CY2020	us-gaap	Repayments Of Long Term Debt RepaymentsOfLongTermDebt	379000
CY2019	us-gaap	Repayments Of Long Term Debt RepaymentsOfLongTermDebt	376000
CY2019	us-gaap	Proceeds From Issuance Of Long Term Debt ProceedsFromIssuanceOfLongTermDebt	9000
CY2021	us-gaap	Net Cash Provided By Used In Financing Activities NetCashProvidedByUsedInFinancingActivities	1166000
CY2020	us-gaap	Net Cash Provided By Used In Financing Activities NetCashProvidedByUsedInFinancingActivities	-1502000
CY2019	us-gaap	Net Cash Provided By Used In Financing Activities NetCashProvidedByUsedInFinancingActivities	-157000
CY2021	us-gaap	Effect Of Exchange Rate On Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	656000
CY2020	us-gaap	Effect Of Exchange Rate On Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	1718000
CY2019	us-gaap	Effect Of Exchange Rate On Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	-1552000
CY2021	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents Period Increase Decrease Including Exchange Rate Effect CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect	-12234000
CY2020	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents Period Increase Decrease Including Exchange Rate Effect CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect	-14064000
CY2019	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents Period Increase Decrease Including Exchange Rate Effect CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect	-3362000
CY2020Q3	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	45070000
CY2019Q3	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	59134000
CY2018Q3	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	62496000
CY2021Q3	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	32836000
CY2020Q3	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	45070000
CY2019Q3	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	59134000
CY2021	us-gaap	Income Taxes Paid Net IncomeTaxesPaidNet	-1868000
CY2020	us-gaap	Income Taxes Paid Net IncomeTaxesPaidNet	-2116000
CY2019	us-gaap	Income Taxes Paid Net IncomeTaxesPaidNet	993000
CY2021	us-gaap	Interest Paid Net InterestPaidNet	241000
CY2020	us-gaap	Interest Paid Net InterestPaidNet	265000
CY2019	us-gaap	Interest Paid Net InterestPaidNet	262000
CY2021	asys	Transfer To Property Plant And Equipment TransferToPropertyPlantAndEquipment	39000
CY2020	asys	Transfer To Property Plant And Equipment TransferToPropertyPlantAndEquipment	37000
CY2021	us-gaap	Right Of Use Asset Obtained In Exchange For Operating Lease Liability RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability	3680000
CY2020	us-gaap	Right Of Use Asset Obtained In Exchange For Operating Lease Liability RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability	5262000
CY2021	us-gaap	Right Of Use Asset Obtained In Exchange For Finance Lease Liability RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability	160000
CY2021	asys	Noncash Accrued For Asset Retirement Obligation NoncashAccruedForAssetRetirementObligation	36000
CY2021	us-gaap	Use Of Estimates UseOfEstimates	<p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;line-height:1.235;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:Times New Roman;">Use of Estimates </span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">– The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.</span></p>
CY2021	us-gaap	Prior Period Reclassification Adjustment Description PriorPeriodReclassificationAdjustmentDescription	<p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;line-height:1.235;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:Times New Roman;">Reclassifications </span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">– Certain reclassifications have been made to prior year financial statements to conform to the current year presentation. Results for all periods presented in this report have been reclassified for changes to our reportable segments (Note 17</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">). These reclassifications had no effect on the previously reported consolidated financial statements for any period.</span></p>
CY2021	us-gaap	Standard Product Warranty Accrual Warranties Issued StandardProductWarrantyAccrualWarrantiesIssued	250000
CY2020	us-gaap	Standard Product Warranty Accrual Warranties Issued StandardProductWarrantyAccrualWarrantiesIssued	393000
CY2021	us-gaap	Lessee Operating Lease Existence Of Option To Extend LesseeOperatingLeaseExistenceOfOptionToExtend	true
CY2019	us-gaap	Standard Product Warranty Accrual Warranties Issued StandardProductWarrantyAccrualWarrantiesIssued	785000
CY2021	us-gaap	Standard Product Warranty Accrual Payments StandardProductWarrantyAccrualPayments	9000
CY2020	us-gaap	Standard Product Warranty Accrual Payments StandardProductWarrantyAccrualPayments	433000
CY2019	us-gaap	Standard Product Warranty Accrual Payments StandardProductWarrantyAccrualPayments	693000
CY2021	us-gaap	Standard Product Warranty Accrual Preexisting Increase Decrease StandardProductWarrantyAccrualPreexistingIncreaseDecrease	-76000
CY2020	us-gaap	Standard Product Warranty Accrual Preexisting Increase Decrease StandardProductWarrantyAccrualPreexistingIncreaseDecrease	-121000
CY2019	us-gaap	Standard Product Warranty Accrual Preexisting Increase Decrease StandardProductWarrantyAccrualPreexistingIncreaseDecrease	-179000
CY2020	us-gaap	Standard Product Warranty Accrual Foreign Currency Translation Gain Loss StandardProductWarrantyAccrualForeignCurrencyTranslationGainLoss	15000
CY2019	us-gaap	Standard Product Warranty Accrual Foreign Currency Translation Gain Loss StandardProductWarrantyAccrualForeignCurrencyTranslationGainLoss	1000
CY2021Q3	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	545000
CY2020Q3	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	380000
CY2019Q3	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	556000
CY2021	us-gaap	Advertising Expense AdvertisingExpense	200000
CY2020	us-gaap	Advertising Expense AdvertisingExpense	300000
CY2019	us-gaap	Advertising Expense AdvertisingExpense	400000
CY2021	us-gaap	Revenue Practical Expedient Remaining Performance Obligation RevenuePracticalExpedientRemainingPerformanceObligation	true
CY2021Q3	us-gaap	Revenue Remaining Performance Obligation Optional Exemption Remaining Duration RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration	P1Y
CY2021	us-gaap	Revenue Practical Expedient Incremental Cost Of Obtaining Contract RevenuePracticalExpedientIncrementalCostOfObtainingContract	true
CY2021	asys	Contract With Customer Amortization Period ContractWithCustomerAmortizationPeriod	P1Y
CY2021Q3	us-gaap	Contract With Customer Asset Gross Current ContractWithCustomerAssetGrossCurrent	0
CY2020Q3	us-gaap	Contract With Customer Asset Gross Current ContractWithCustomerAssetGrossCurrent	0
CY2020Q3	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	380000
CY2019Q3	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	556000
CY2018Q3	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	644000
CY2019	us-gaap	Research And Development Arrangement With Federal Government Customer Funding To Offset Costs Incurred ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred	44000
CY2021	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	5979000
CY2020	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	3312000
CY2019	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	3068000
CY2021	us-gaap	Research And Development Expense ResearchAndDevelopmentExpense	5979000
CY2020	us-gaap	Research And Development Expense ResearchAndDevelopmentExpense	3689000
CY2019	us-gaap	Research And Development Expense ResearchAndDevelopmentExpense	3112000
CY2020	us-gaap	Research And Development Arrangement With Federal Government Customer Funding To Offset Costs Incurred ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred	377000
CY2021	us-gaap	Concentration Risk Credit Risk ConcentrationRiskCreditRisk	<p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;line-height:1.3;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:Times New Roman;">Concentrations of Credit Risk </span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">– Our customers are primarily manufacturers of semiconductor substrates and devices and electronic assemblies. Financial instruments that potentially subject us to significant concentrations of credit risk consist principally of cash and trade accounts receivable. Credit risk is managed by performing ongoing credit evaluations of the customers’ financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and country of domicile.</span></p><p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;line-height:1.3;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:Times New Roman;"> </span></p><p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;line-height:1.3;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">As of September 30, 2021</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">, one Semiconductor customer individually represented </span><span style="font-size:10.0pt;font-family:Times New Roman;background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">14</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">% of accounts receivable. As of </span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">September 30, 2020</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">, two Semiconductor customers individually represented </span><span style="font-size:10.0pt;font-family:Times New Roman;background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">11</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">% and </span><span style="font-size:10.0pt;font-family:Times New Roman;background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">10</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">% of accounts receivable.</span></p><p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;line-height:1.3;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:Times New Roman;"> </span></p><p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;line-height:1.3;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">Refer to Note 19 </span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:Times New Roman;">for information regarding revenue and assets in other countries subject to fluctuation in foreign currency exchange rates.</span></p>
CY2021	us-gaap	Income Loss From Continuing Operations Including Portion Attributable To Noncontrolling Interest IncomeLossFromContinuingOperationsIncludingPortionAttributableToNoncontrollingInterest	1508000
CY2020	us-gaap	Income Loss From Continuing Operations Including Portion Attributable To Noncontrolling Interest IncomeLossFromContinuingOperationsIncludingPortionAttributableToNoncontrollingInterest	-3907000
CY2019	us-gaap	Income Loss From Continuing Operations Including Portion Attributable To Noncontrolling Interest IncomeLossFromContinuingOperationsIncludingPortionAttributableToNoncontrollingInterest	3135000
CY2020	us-gaap	Income Loss From Discontinued Operations Net Of Tax IncomeLossFromDiscontinuedOperationsNetOfTax	-11816000
CY2019	us-gaap	Income Loss From Discontinued Operations Net Of Tax IncomeLossFromDiscontinuedOperationsNetOfTax	-8297000
CY2021	us-gaap	Net Income Loss NetIncomeLoss	1508000
CY2020	us-gaap	Net Income Loss NetIncomeLoss	-15723000
CY2019	us-gaap	Net Income Loss NetIncomeLoss	-5162000
CY2021	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14189000
CY2020	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14159000
CY2019	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14240000
CY2021	us-gaap	Weighted Average Number Diluted Shares Outstanding Adjustment WeightedAverageNumberDilutedSharesOutstandingAdjustment	151000
CY2019	us-gaap	Weighted Average Number Diluted Shares Outstanding Adjustment WeightedAverageNumberDilutedSharesOutstandingAdjustment	35000
CY2021	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14340000
CY2020	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14159000
CY2019	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14275000
CY2021	us-gaap	Income Loss From Continuing Operations Per Basic Share IncomeLossFromContinuingOperationsPerBasicShare	0.11
CY2020	us-gaap	Income Loss From Continuing Operations Per Basic Share IncomeLossFromContinuingOperationsPerBasicShare	-0.28
CY2019	us-gaap	Income Loss From Continuing Operations Per Basic Share IncomeLossFromContinuingOperationsPerBasicShare	0.22
CY2020	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Basic Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerBasicShare	-0.83
CY2019	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Basic Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerBasicShare	-0.58
CY2021	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	0.11
CY2020	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	-1.11
CY2019	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	-0.36
CY2021	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	0.11
CY2020	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	-0.28
CY2019	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	0.22
CY2020	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Diluted Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerDilutedShare	-0.83
CY2019	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Diluted Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerDilutedShare	-0.58
CY2021	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	0.11
CY2020	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	-1.11
CY2019	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	-0.36
CY2020Q3	us-gaap	Restructuring Reserve RestructuringReserve	102000
CY2019Q3	us-gaap	Restructuring Reserve RestructuringReserve	40000
CY2021	us-gaap	Restructuring Charges RestructuringCharges	86000
CY2020	us-gaap	Restructuring Charges RestructuringCharges	217000
CY2021	us-gaap	Payments For Restructuring PaymentsForRestructuring	171000
CY2020	us-gaap	Payments For Restructuring PaymentsForRestructuring	155000
CY2021Q3	us-gaap	Restructuring Reserve RestructuringReserve	17000
CY2020Q3	us-gaap	Restructuring Reserve RestructuringReserve	102000
CY2018Q4	us-gaap	Severance Costs1 SeveranceCosts1	864000
CY2018Q4	us-gaap	Payments To Employees PaymentsToEmployees	458500
CY2018Q4	asys	Supplemental Unemployment Benefits Share Based Compensation Arrangement By Share Based Payment Award Options Exercisable Weighted Average Exercise Price SupplementalUnemploymentBenefitsShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice	7.01
CY2018Q4	asys	Supplemental Unemployment Benefits Share Based Compensation Arrangement By Share Based Payment Award Remaining Options Exercisable Period SupplementalUnemploymentBenefitsShareBasedCompensationArrangementByShareBasedPaymentAwardRemainingOptionsExercisablePeriod	P90D
CY2018Q4	asys	Supplemental Unemployment Benefits Additional Stock Based Compensation Expense SupplementalUnemploymentBenefitsAdditionalStockBasedCompensationExpense	108000
CY2021Q3	us-gaap	Inventory Raw Materials InventoryRawMaterials	16260000
CY2020Q3	us-gaap	Inventory Raw Materials InventoryRawMaterials	14530000
CY2021Q3	us-gaap	Inventory Work In Process InventoryWorkInProcess	4865000
CY2020Q3	us-gaap	Inventory Work In Process InventoryWorkInProcess	3074000
CY2021Q3	us-gaap	Inventory Finished Goods InventoryFinishedGoods	5055000
CY2020Q3	us-gaap	Inventory Finished Goods InventoryFinishedGoods	3942000
CY2021Q3	us-gaap	Inventory Gross InventoryGross	26180000
CY2020Q3	us-gaap	Inventory Gross InventoryGross	21546000
CY2021Q3	us-gaap	Inventory Valuation Reserves InventoryValuationReserves	4105000
CY2020Q3	us-gaap	Inventory Valuation Reserves InventoryValuationReserves	4269000
CY2021Q3	us-gaap	Inventory Net InventoryNet	22075000
CY2020Q3	us-gaap	Inventory Net InventoryNet	17277000
CY2021Q3	us-gaap	Property Plant And Equipment Gross PropertyPlantAndEquipmentGross	21977000
CY2020Q3	us-gaap	Property Plant And Equipment Gross PropertyPlantAndEquipmentGross	19111000
CY2021Q3	us-gaap	Accumulated Depreciation Depletion And Amortization Property Plant And Equipment AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment	7894000
CY2020Q3	us-gaap	Accumulated Depreciation Depletion And Amortization Property Plant And Equipment AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment	7116000
CY2021Q3	us-gaap	Property Plant And Equipment Net PropertyPlantAndEquipmentNet	14083000
CY2020Q3	us-gaap	Property Plant And Equipment Net PropertyPlantAndEquipmentNet	11995000
CY2021	us-gaap	Depreciation Depreciation	1200000
CY2020	us-gaap	Depreciation Depreciation	800000
CY2019	us-gaap	Depreciation Depreciation	900000
CY2021Q3	us-gaap	Operating Lease Right Of Use Asset OperatingLeaseRightOfUseAsset	8646000
CY2020Q3	us-gaap	Operating Lease Right Of Use Asset OperatingLeaseRightOfUseAsset	5124000
CY2021Q3	us-gaap	Finance Lease Right Of Use Asset FinanceLeaseRightOfUseAsset	174000
CY2020Q3	us-gaap	Finance Lease Right Of Use Asset FinanceLeaseRightOfUseAsset	26000
CY2021Q3	asys	Lease Right Of Use Asset LeaseRightOfUseAsset	8820000
CY2020Q3	asys	Lease Right Of Use Asset LeaseRightOfUseAsset	5150000
CY2021Q3	us-gaap	Operating Lease Liability Current OperatingLeaseLiabilityCurrent	470000
CY2020Q3	us-gaap	Operating Lease Liability Current OperatingLeaseLiabilityCurrent	113000
CY2021Q3	us-gaap	Finance Lease Liability Current FinanceLeaseLiabilityCurrent	61000
CY2020Q3	us-gaap	Finance Lease Liability Current FinanceLeaseLiabilityCurrent	11000
CY2021Q3	us-gaap	Operating Lease Liability Noncurrent OperatingLeaseLiabilityNoncurrent	8279000
CY2020Q3	us-gaap	Operating Lease Liability Noncurrent OperatingLeaseLiabilityNoncurrent	5048000
CY2021Q3	us-gaap	Finance Lease Liability Noncurrent FinanceLeaseLiabilityNoncurrent	110000
CY2020Q3	us-gaap	Finance Lease Liability Noncurrent FinanceLeaseLiabilityNoncurrent	16000
CY2021Q3	asys	Lease Liability LeaseLiability	8920000
CY2020Q3	asys	Lease Liability LeaseLiability	5188000
CY2021	us-gaap	Lease Cost LeaseCost	1005000
CY2020	us-gaap	Lease Cost LeaseCost	480000
CY2021Q3	us-gaap	Lessee Operating Lease Liability Payments Due Next Twelve Months LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths	1060000
CY2021Q3	us-gaap	Finance Lease Liability Payments Due Next Twelve Months FinanceLeaseLiabilityPaymentsDueNextTwelveMonths	66000
CY2021Q3	asys	Operating And Finance Lease Liability Payments Due Next Twelve Months OperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths	1126000
CY2021Q3	us-gaap	Lessee Operating Lease Liability Payments Due Year Two LesseeOperatingLeaseLiabilityPaymentsDueYearTwo	1053000
CY2021Q3	us-gaap	Finance Lease Liability Payments Due Year Two FinanceLeaseLiabilityPaymentsDueYearTwo	66000
CY2021Q3	asys	Operating And Finance Lease Liability Payments Due Year Two OperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo	1119000
CY2021Q3	us-gaap	Lessee Operating Lease Liability Payments Due Year Three LesseeOperatingLeaseLiabilityPaymentsDueYearThree	1037000
CY2021Q3	us-gaap	Finance Lease Liability Payments Due Year Three FinanceLeaseLiabilityPaymentsDueYearThree	48000
CY2021Q3	asys	Operating And Finance Lease Liability Payments Due Year Three OperatingAndFinanceLeaseLiabilityPaymentsDueYearThree	1085000
CY2021Q3	us-gaap	Lessee Operating Lease Liability Payments Due Year Four LesseeOperatingLeaseLiabilityPaymentsDueYearFour	1022000
CY2021Q3	asys	Operating And Finance Lease Liability Payments Due Year Four OperatingAndFinanceLeaseLiabilityPaymentsDueYearFour	1022000
CY2021Q3	us-gaap	Lessee Operating Lease Liability Payments Due Year Five LesseeOperatingLeaseLiabilityPaymentsDueYearFive	906000
CY2021Q3	asys	Operating And Finance Lease Liability Payments Due Year Five OperatingAndFinanceLeaseLiabilityPaymentsDueYearFive	906000
CY2021Q3	us-gaap	Lessee Operating Lease Liability Payments Due After Year Five LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive	8825000
CY2021Q3	asys	Operating And Finance Lease Liability Payments Due After Year Five OperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive	8825000
CY2021Q3	us-gaap	Lessee Operating Lease Liability Payments Due LesseeOperatingLeaseLiabilityPaymentsDue	13903000
CY2021Q3	us-gaap	Finance Lease Liability Payments Due FinanceLeaseLiabilityPaymentsDue	180000
CY2021Q3	asys	Operating And Finance Lease Liability Payments Due OperatingAndFinanceLeaseLiabilityPaymentsDue	14083000
CY2021Q3	us-gaap	Lessee Operating Lease Liability Undiscounted Excess Amount LesseeOperatingLeaseLiabilityUndiscountedExcessAmount	5154000
CY2021Q3	us-gaap	Finance Lease Liability Undiscounted Excess Amount FinanceLeaseLiabilityUndiscountedExcessAmount	9000
CY2021Q3	asys	Operating And Finance Lease Liabilities Undiscounted Excess Amount OperatingAndFinanceLeaseLiabilitiesUndiscountedExcessAmount	5163000
CY2021Q3	us-gaap	Operating Lease Liability OperatingLeaseLiability	8749000
CY2021Q3	us-gaap	Finance Lease Liability FinanceLeaseLiability	171000
CY2021Q3	asys	Operating And Finance Lease Liability OperatingAndFinanceLeaseLiability	8920000
CY2021	us-gaap	Lessee Operating Lease Option To Extend LesseeOperatingLeaseOptionToExtend	Operating lease payments include $6.4 million related to options to extend lease terms that are reasonably certain of being exercised.
CY2021	asys	Lessee Payments In Optional Extension Periods LesseePaymentsInOptionalExtensionPeriods	6400000
CY2021	us-gaap	Lessee Operating Lease Existence Of Option To Extend LesseeOperatingLeaseExistenceOfOptionToExtend	true
CY2021Q3	us-gaap	Operating Lease Weighted Average Remaining Lease Term1 OperatingLeaseWeightedAverageRemainingLeaseTerm1	P16Y11M1D
CY2021Q3	us-gaap	Finance Lease Weighted Average Remaining Lease Term1 FinanceLeaseWeightedAverageRemainingLeaseTerm1	P2Y9M14D
CY2021Q3	us-gaap	Operating Lease Weighted Average Discount Rate Percent OperatingLeaseWeightedAverageDiscountRatePercent	0.0417
CY2021Q3	us-gaap	Finance Lease Weighted Average Discount Rate Percent FinanceLeaseWeightedAverageDiscountRatePercent	0.0417
CY2021Q3	us-gaap	Finite Lived Intangible Assets Gross FiniteLivedIntangibleAssetsGross	2488000
CY2020Q3	us-gaap	Finite Lived Intangible Assets Gross FiniteLivedIntangibleAssetsGross	2088000
CY2021Q3	us-gaap	Finite Lived Intangible Assets Accumulated Amortization FiniteLivedIntangibleAssetsAccumulatedAmortization	1630000
CY2020Q3	us-gaap	Finite Lived Intangible Assets Accumulated Amortization FiniteLivedIntangibleAssetsAccumulatedAmortization	1479000
CY2021Q3	us-gaap	Finite Lived Intangible Assets Net FiniteLivedIntangibleAssetsNet	858000
CY2020Q3	us-gaap	Finite Lived Intangible Assets Net FiniteLivedIntangibleAssetsNet	609000
CY2021	asys	Amortization Expense Credit Of Intangible Assets AmortizationExpenseCreditOfIntangibleAssets	200000
CY2020	asys	Amortization Expense Credit Of Intangible Assets AmortizationExpenseCreditOfIntangibleAssets	300000
CY2019	asys	Amortization Expense Credit Of Intangible Assets AmortizationExpenseCreditOfIntangibleAssets	300000
CY2021Q3	us-gaap	Finite Lived Intangible Assets Amortization Expense Next Twelve Months FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths	100000
CY2021Q3	us-gaap	Finite Lived Intangible Assets Amortization Expense Year Two FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo	100000
CY2021Q3	us-gaap	Finite Lived Intangible Assets Amortization Expense Year Three FiniteLivedIntangibleAssetsAmortizationExpenseYearThree	98000
CY2021Q3	us-gaap	Finite Lived Intangible Assets Amortization Expense Year Four FiniteLivedIntangibleAssetsAmortizationExpenseYearFour	97000
CY2021Q3	us-gaap	Finite Lived Intangible Assets Amortization Expense Year Five FiniteLivedIntangibleAssetsAmortizationExpenseYearFive	97000
CY2021Q3	us-gaap	Finite Lived Intangible Assets Amortization Expense After Year Five FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive	366000
CY2021Q3	us-gaap	Finite Lived Intangible Assets Net FiniteLivedIntangibleAssetsNet	858000
CY2020Q3	us-gaap	Goodwill Gross GoodwillGross	6633000
CY2020Q3	us-gaap	Goodwill Goodwill	6633000
CY2021	us-gaap	Goodwill Acquired During Period GoodwillAcquiredDuringPeriod	4535000
CY2021Q3	us-gaap	Goodwill Goodwill	11168000
CY2021Q3	us-gaap	Goodwill Gross GoodwillGross	11168000
CY2021Q3	us-gaap	Goodwill Goodwill	11168000
CY2021	asys	Income Loss From Continuing And Discontinued Operations Before Income Taxes Domestic IncomeLossFromContinuingAndDiscontinuedOperationsBeforeIncomeTaxesDomestic	-3320000
CY2020	asys	Income Loss From Continuing And Discontinued Operations Before Income Taxes Domestic IncomeLossFromContinuingAndDiscontinuedOperationsBeforeIncomeTaxesDomestic	-18652000
CY2019	asys	Income Loss From Continuing And Discontinued Operations Before Income Taxes Domestic IncomeLossFromContinuingAndDiscontinuedOperationsBeforeIncomeTaxesDomestic	916000
CY2021	asys	Income Loss From Continuing And Discontinued Operations Before Income Taxes Foreign IncomeLossFromContinuingAndDiscontinuedOperationsBeforeIncomeTaxesForeign	6754000
CY2020	asys	Income Loss From Continuing And Discontinued Operations Before Income Taxes Foreign IncomeLossFromContinuingAndDiscontinuedOperationsBeforeIncomeTaxesForeign	3673000
CY2019	asys	Income Loss From Continuing And Discontinued Operations Before Income Taxes Foreign IncomeLossFromContinuingAndDiscontinuedOperationsBeforeIncomeTaxesForeign	-4648000
CY2021	asys	Income Loss From Continuing And Discontinued Operations Before Income Taxes Minority Interest And Income Loss From Equity Method Investments IncomeLossFromContinuingAndDiscontinuedOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments	3434000
CY2020	asys	Income Loss From Continuing And Discontinued Operations Before Income Taxes Minority Interest And Income Loss From Equity Method Investments IncomeLossFromContinuingAndDiscontinuedOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments	-14979000
CY2019	asys	Income Loss From Continuing And Discontinued Operations Before Income Taxes Minority Interest And Income Loss From Equity Method Investments IncomeLossFromContinuingAndDiscontinuedOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments	-3732000
CY2020	us-gaap	Current Federal Tax Expense Benefit CurrentFederalTaxExpenseBenefit	-239000
CY2021	us-gaap	Current Foreign Tax Expense Benefit CurrentForeignTaxExpenseBenefit	1999000
CY2020	us-gaap	Current Foreign Tax Expense Benefit CurrentForeignTaxExpenseBenefit	1407000
CY2019	us-gaap	Income Tax Reconciliation Change In Deferred Tax Assets Valuation Allowance IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance	1682000
CY2021	us-gaap	Income Tax Reconciliation Tax Contingencies IncomeTaxReconciliationTaxContingencies	-276000
CY2020	us-gaap	Income Tax Reconciliation Tax Contingencies IncomeTaxReconciliationTaxContingencies	-47000
CY2019	us-gaap	Current Foreign Tax Expense Benefit CurrentForeignTaxExpenseBenefit	1278000
CY2021	asys	Current Foreign Tax Expense Benefit Withholding Taxes CurrentForeignTaxExpenseBenefitWithholdingTaxes	292000
CY2020	asys	Current Foreign Tax Expense Benefit Withholding Taxes CurrentForeignTaxExpenseBenefitWithholdingTaxes	201000
CY2019	asys	Current Foreign Tax Expense Benefit Withholding Taxes CurrentForeignTaxExpenseBenefitWithholdingTaxes	94000
CY2021	us-gaap	Current State And Local Tax Expense Benefit CurrentStateAndLocalTaxExpenseBenefit	-300000
CY2020	us-gaap	Current State And Local Tax Expense Benefit CurrentStateAndLocalTaxExpenseBenefit	-59000
CY2019	us-gaap	Current State And Local Tax Expense Benefit CurrentStateAndLocalTaxExpenseBenefit	58000
CY2021	asys	Current Income Tax Expense Benefit Continuing And Discontinued Operations CurrentIncomeTaxExpenseBenefitContinuingAndDiscontinuedOperations	1991000
CY2020	asys	Current Income Tax Expense Benefit Continuing And Discontinued Operations CurrentIncomeTaxExpenseBenefitContinuingAndDiscontinuedOperations	1310000
CY2019	asys	Current Income Tax Expense Benefit Continuing And Discontinued Operations CurrentIncomeTaxExpenseBenefitContinuingAndDiscontinuedOperations	1430000
CY2021	us-gaap	Deferred Foreign Income Tax Expense Benefit DeferredForeignIncomeTaxExpenseBenefit	-65000
CY2020	us-gaap	Deferred Foreign Income Tax Expense Benefit DeferredForeignIncomeTaxExpenseBenefit	-566000
CY2021	us-gaap	Deferred Income Tax Expense Benefit DeferredIncomeTaxExpenseBenefit	-65000
CY2020	us-gaap	Deferred Income Tax Expense Benefit DeferredIncomeTaxExpenseBenefit	-566000
CY2021	us-gaap	Income Tax Expense Benefit Intraperiod Tax Allocation IncomeTaxExpenseBenefitIntraperiodTaxAllocation	1926000
CY2020	us-gaap	Income Tax Expense Benefit Intraperiod Tax Allocation IncomeTaxExpenseBenefitIntraperiodTaxAllocation	744000
CY2019	us-gaap	Income Tax Expense Benefit Intraperiod Tax Allocation IncomeTaxExpenseBenefitIntraperiodTaxAllocation	1430000
CY2021	us-gaap	Effective Income Tax Rate Reconciliation At Federal Statutory Income Tax Rate EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate	0.210
CY2020	us-gaap	Effective Income Tax Rate Reconciliation At Federal Statutory Income Tax Rate EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate	0.210
CY2019	us-gaap	Effective Income Tax Rate Reconciliation At Federal Statutory Income Tax Rate EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate	0.210
CY2021	us-gaap	Income Tax Reconciliation Income Tax Expense Benefit At Federal Statutory Income Tax Rate IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate	722000
CY2020	us-gaap	Income Tax Reconciliation Income Tax Expense Benefit At Federal Statutory Income Tax Rate IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate	-3146000
CY2019	us-gaap	Income Tax Reconciliation Income Tax Expense Benefit At Federal Statutory Income Tax Rate IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate	-784000
CY2021	us-gaap	Income Tax Reconciliation Nondeductible Expense IncomeTaxReconciliationNondeductibleExpense	54000
CY2020	us-gaap	Income Tax Reconciliation Nondeductible Expense IncomeTaxReconciliationNondeductibleExpense	145000
CY2019	us-gaap	Income Tax Reconciliation Nondeductible Expense IncomeTaxReconciliationNondeductibleExpense	272000
CY2021	us-gaap	Income Tax Reconciliation State And Local Income Taxes IncomeTaxReconciliationStateAndLocalIncomeTaxes	24000
CY2020	us-gaap	Income Tax Reconciliation State And Local Income Taxes IncomeTaxReconciliationStateAndLocalIncomeTaxes	34000
CY2019	us-gaap	Income Tax Reconciliation State And Local Income Taxes IncomeTaxReconciliationStateAndLocalIncomeTaxes	31000
CY2021	us-gaap	Income Tax Reconciliation Change In Deferred Tax Assets Valuation Allowance IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance	842000
CY2020	us-gaap	Income Tax Reconciliation Change In Deferred Tax Assets Valuation Allowance IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance	3775000
CY2019	us-gaap	Income Tax Reconciliation Tax Contingencies IncomeTaxReconciliationTaxContingencies	74000
CY2021	us-gaap	Income Tax Reconciliation Foreign Income Tax Rate Differential IncomeTaxReconciliationForeignIncomeTaxRateDifferential	267000
CY2020	us-gaap	Income Tax Reconciliation Foreign Income Tax Rate Differential IncomeTaxReconciliationForeignIncomeTaxRateDifferential	222000
CY2019	us-gaap	Income Tax Reconciliation Foreign Income Tax Rate Differential IncomeTaxReconciliationForeignIncomeTaxRateDifferential	150000
CY2021	us-gaap	Income Tax Reconciliation Other Adjustments IncomeTaxReconciliationOtherAdjustments	293000
CY2020	us-gaap	Income Tax Reconciliation Other Adjustments IncomeTaxReconciliationOtherAdjustments	-239000
CY2019	us-gaap	Income Tax Reconciliation Other Adjustments IncomeTaxReconciliationOtherAdjustments	5000
CY2021	us-gaap	Income Tax Expense Benefit Intraperiod Tax Allocation IncomeTaxExpenseBenefitIntraperiodTaxAllocation	1926000
CY2020	us-gaap	Income Tax Expense Benefit Intraperiod Tax Allocation IncomeTaxExpenseBenefitIntraperiodTaxAllocation	744000
CY2019	us-gaap	Income Tax Expense Benefit Intraperiod Tax Allocation IncomeTaxExpenseBenefitIntraperiodTaxAllocation	1430000
CY2021Q3	asys	Deferred Tax Assets Tax Deferred Expense Capitalized Inventory Costs DeferredTaxAssetsTaxDeferredExpenseCapitalizedInventoryCosts	103000
CY2021Q3	us-gaap	Deferred Tax Assets Tax Deferred Expense Reserves And Accruals Warranty Reserves DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves	78000
CY2020Q3	us-gaap	Deferred Tax Assets Tax Deferred Expense Reserves And Accruals Warranty Reserves DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves	53000
CY2020Q3	asys	Deferred Tax Assets Tax Deferred Expense Capitalized Inventory Costs DeferredTaxAssetsTaxDeferredExpenseCapitalizedInventoryCosts	204000
CY2021Q3	asys	Deferred Tax Assets Tax Deferred Expense Inventory Write Downs DeferredTaxAssetsTaxDeferredExpenseInventoryWriteDowns	815000
CY2020Q3	asys	Deferred Tax Assets Tax Deferred Expense Inventory Write Downs DeferredTaxAssetsTaxDeferredExpenseInventoryWriteDowns	991000
CY2020Q3	us-gaap	Deferred Tax Assets Deferred Income DeferredTaxAssetsDeferredIncome	1000
CY2021Q3	us-gaap	Deferred Tax Assets Tax Deferred Expense Reserves And Accruals Reserves DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsReserves	1827000
CY2020Q3	us-gaap	Deferred Tax Assets Tax Deferred Expense Reserves And Accruals Reserves DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsReserves	2913000
CY2021Q3	us-gaap	Deferred Tax Assets Tax Deferred Expense Compensation And Benefits Share Based Compensation Cost DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost	832000
CY2020Q3	us-gaap	Deferred Tax Assets Tax Deferred Expense Compensation And Benefits Share Based Compensation Cost DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost	806000
CY2021Q3	us-gaap	Deferred Tax Assets Operating Loss Carryforwards Domestic DeferredTaxAssetsOperatingLossCarryforwardsDomestic	20365000
CY2020Q3	us-gaap	Deferred Tax Assets Operating Loss Carryforwards Domestic DeferredTaxAssetsOperatingLossCarryforwardsDomestic	18445000
CY2021Q3	asys	Deferred Tax Assets Operating Loss Carry Forwards Foreign And State DeferredTaxAssetsOperatingLossCarryForwardsForeignAndState	285000
CY2020Q3	asys	Deferred Tax Assets Operating Loss Carry Forwards Foreign And State DeferredTaxAssetsOperatingLossCarryForwardsForeignAndState	231000
CY2021Q3	us-gaap	Deferred Tax Liabilities Property Plant And Equipment DeferredTaxLiabilitiesPropertyPlantAndEquipment	1724000
CY2020Q3	us-gaap	Deferred Tax Liabilities Property Plant And Equipment DeferredTaxLiabilitiesPropertyPlantAndEquipment	1465000
CY2021Q3	us-gaap	Deferred Tax Assets Tax Credit Carryforwards Foreign DeferredTaxAssetsTaxCreditCarryforwardsForeign	1207000
CY2021Q3	us-gaap	Deferred Tax Assets Other DeferredTaxAssetsOther	135000
CY2020Q3	us-gaap	Deferred Tax Assets Other DeferredTaxAssetsOther	120000
CY2021Q3	us-gaap	Deferred Tax Assets Gross DeferredTaxAssetsGross	23923000
CY2020Q3	us-gaap	Deferred Tax Assets Gross DeferredTaxAssetsGross	22299000
CY2021Q3	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	23292000
CY2020Q3	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	21733000
CY2021Q3	us-gaap	Deferred Tax Assets Liabilities Net DeferredTaxAssetsLiabilitiesNet	631000
CY2020Q3	us-gaap	Deferred Tax Assets Liabilities Net DeferredTaxAssetsLiabilitiesNet	566000
CY2020Q3	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	21733000
CY2019Q3	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	23900000
CY2021	us-gaap	Valuation Allowance Deferred Tax Asset Change In Amount ValuationAllowanceDeferredTaxAssetChangeInAmount	1559000
CY2020	us-gaap	Valuation Allowance Deferred Tax Asset Change In Amount ValuationAllowanceDeferredTaxAssetChangeInAmount	-2167000
CY2021Q3	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	23292000
CY2020Q3	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	21733000
CY2021	us-gaap	Valuation Allowance Deferred Tax Asset Change In Amount ValuationAllowanceDeferredTaxAssetChangeInAmount	1600000
CY2020	us-gaap	Valuation Allowance Deferred Tax Asset Change In Amount ValuationAllowanceDeferredTaxAssetChangeInAmount	-2200000
CY2021Q3	asys	Operating Loss Carry Forwards Annual Utilization Limitations OperatingLossCarryForwardsAnnualUtilizationLimitations	800000
CY2021	asys	Operating Loss Carry Forwards Annual Utilization Limitations As Percentage On Taxable Income OperatingLossCarryForwardsAnnualUtilizationLimitationsAsPercentageOnTaxableIncome	0.80
CY2021Q3	us-gaap	Long Term Debt Maturities Repayments Of Principal In Next Twelve Months LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths	396000
CY2020Q3	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	1225000
CY2019Q3	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	1272000
CY2018Q3	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	1198000
CY2019	us-gaap	Unrecognized Tax Benefits Increases Resulting From Prior Period Tax Positions UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions	74000
CY2021	us-gaap	Unrecognized Tax Benefits Reductions Resulting From Lapse Of Applicable Statute Of Limitations UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations	276000
CY2020	us-gaap	Unrecognized Tax Benefits Reductions Resulting From Lapse Of Applicable Statute Of Limitations UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations	47000
CY2021Q3	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	949000
CY2020Q3	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	1225000
CY2019Q3	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	1272000
CY2021Q3	us-gaap	Unrecognized Tax Benefits That Would Impact Effective Tax Rate UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate	300000
CY2021	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Expense UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense	-100000
CY2020	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Expense UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense	4000
CY2019	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Expense UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense	100000
CY2021Q3	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Accrued UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued	600000
CY2020Q3	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Accrued UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued	800000
CY2021Q3	us-gaap	Long Term Debt Maturities Repayments Of Principal In Year Two LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo	4402000
CY2021Q3	us-gaap	Long Term Debt LongTermDebt	4798000
CY2021	us-gaap	Share Based Compensation ShareBasedCompensation	400000
CY2020	us-gaap	Share Based Compensation ShareBasedCompensation	300000
CY2019	us-gaap	Share Based Compensation ShareBasedCompensation	600000
CY2021Q3	us-gaap	Employee Service Share Based Compensation Nonvested Awards Total Compensation Cost Not Yet Recognized Stock Options EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions	400000
CY2021	us-gaap	Employee Service Share Based Compensation Nonvested Awards Total Compensation Cost Not Yet Recognized Period For Recognition1 EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1	P1Y5M26D
CY2021Q3	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Number Of Shares Available For Grant ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant	1014754
CY2021Q3	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Outstanding Number ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber	608269
CY2021	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Risk Free Interest Rate ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate	0.01
CY2020	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Risk Free Interest Rate ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate	0.01
CY2019	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Risk Free Interest Rate ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate	0.03
CY2021	us-gaap	Sharebased Compensation Arrangement By Sharebased Payment Award Fair Value Assumptions Expected Term1 SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1	P6Y
CY2020	us-gaap	Sharebased Compensation Arrangement By Sharebased Payment Award Fair Value Assumptions Expected Term1 SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1	P6Y
CY2019	us-gaap	Sharebased Compensation Arrangement By Sharebased Payment Award Fair Value Assumptions Expected Term1 SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1	P6Y
CY2021	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Expected Dividend Rate ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate	0
CY2020	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Expected Dividend Rate ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate	0
CY2019	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Expected Dividend Rate ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate	0
CY2021	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Expected Volatility Rate ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate	0.58
CY2020	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Expected Volatility Rate ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate	0.58
CY2019	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Expected Volatility Rate ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate	0.60
CY2021Q3	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Outstanding Intrinsic Value ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue	3012000
CY2021Q3	us-gaap	Sharebased Compensation Arrangement By Sharebased Payment Award Options Exercisable Intrinsic Value1 SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1	1844000
CY2021	us-gaap	Defined Contribution Plan Employer Matching Contribution Percent Of Match DefinedContributionPlanEmployerMatchingContributionPercentOfMatch	0.60
CY2021	us-gaap	Defined Contribution Plan Employer Discretionary Contribution Amount DefinedContributionPlanEmployerDiscretionaryContributionAmount	300000
CY2020	us-gaap	Defined Contribution Plan Employer Discretionary Contribution Amount DefinedContributionPlanEmployerDiscretionaryContributionAmount	300000
CY2019	us-gaap	Defined Contribution Plan Employer Discretionary Contribution Amount DefinedContributionPlanEmployerDiscretionaryContributionAmount	300000
CY2021Q3	us-gaap	Purchase Obligation PurchaseObligation	17000000.0
CY2021	us-gaap	Noncash Or Part Noncash Acquisition Fixed Assets Acquired1 NoncashOrPartNoncashAcquisitionFixedAssetsAcquired1	0
CY2020	us-gaap	Noncash Or Part Noncash Acquisition Fixed Assets Acquired1 NoncashOrPartNoncashAcquisitionFixedAssetsAcquired1	80000
CY2021	us-gaap	Number Of Operating Segments NumberOfOperatingSegments	2
CY2021	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	85205000
CY2020	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	65463000
CY2019	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	85035000
CY2021	us-gaap	Operating Income Loss OperatingIncomeLoss	3725000
CY2020	us-gaap	Operating Income Loss OperatingIncomeLoss	-485000
CY2019	us-gaap	Operating Income Loss OperatingIncomeLoss	4916000
CY2021Q3	us-gaap	Assets Assets	116913000
CY2020Q3	us-gaap	Assets Assets	102098000
CY2021	us-gaap	Revenues Revenues	85205000
CY2020	us-gaap	Revenues Revenues	65463000
CY2019	us-gaap	Revenues Revenues	85035000
CY2021	us-gaap	Operating Income Loss OperatingIncomeLoss	3725000
CY2020	us-gaap	Operating Income Loss OperatingIncomeLoss	-485000
CY2019	us-gaap	Operating Income Loss OperatingIncomeLoss	4916000
CY2021Q3	us-gaap	Noncurrent Assets NoncurrentAssets	14083000
CY2020Q3	us-gaap	Allowance For Doubtful Accounts Receivable Current AllowanceForDoubtfulAccountsReceivableCurrent	159000
CY2019Q3	us-gaap	Allowance For Doubtful Accounts Receivable Current AllowanceForDoubtfulAccountsReceivableCurrent	172000
CY2018Q3	us-gaap	Allowance For Doubtful Accounts Receivable Current AllowanceForDoubtfulAccountsReceivableCurrent	454000
CY2021	asys	Provision For Doubtful Accounts Net Of Foreign Exchange Currency Adjustment ProvisionForDoubtfulAccountsNetOfForeignExchangeCurrencyAdjustment	44000
CY2020	asys	Provision For Doubtful Accounts Net Of Foreign Exchange Currency Adjustment ProvisionForDoubtfulAccountsNetOfForeignExchangeCurrencyAdjustment	86000
CY2019	asys	Provision For Doubtful Accounts Net Of Foreign Exchange Currency Adjustment ProvisionForDoubtfulAccountsNetOfForeignExchangeCurrencyAdjustment	200000
CY2021	us-gaap	Allowance For Doubtful Accounts Receivable Write Offs AllowanceForDoubtfulAccountsReceivableWriteOffs	2000
CY2020	us-gaap	Allowance For Doubtful Accounts Receivable Write Offs AllowanceForDoubtfulAccountsReceivableWriteOffs	26000
CY2019	us-gaap	Allowance For Doubtful Accounts Receivable Write Offs AllowanceForDoubtfulAccountsReceivableWriteOffs	402000
CY2021	asys	Accounts Receivable Allowance For Credit Loss Adjustment AccountsReceivableAllowanceForCreditLossAdjustment	-13000
CY2020	asys	Accounts Receivable Allowance For Credit Loss Adjustment AccountsReceivableAllowanceForCreditLossAdjustment	-73000
CY2019	asys	Accounts Receivable Allowance For Credit Loss Adjustment AccountsReceivableAllowanceForCreditLossAdjustment	-80000
CY2021Q3	us-gaap	Allowance For Doubtful Accounts Receivable Current AllowanceForDoubtfulAccountsReceivableCurrent	188000
CY2020Q3	us-gaap	Allowance For Doubtful Accounts Receivable Current AllowanceForDoubtfulAccountsReceivableCurrent	159000
CY2019Q3	us-gaap	Allowance For Doubtful Accounts Receivable Current AllowanceForDoubtfulAccountsReceivableCurrent	172000
CY2020Q4	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	17975000
CY2021Q1	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	19790000
CY2021Q2	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	23100000
CY2021Q3	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	24340000
CY2020Q4	us-gaap	Cost Of Goods And Services Sold CostOfGoodsAndServicesSold	10463000
CY2021Q1	us-gaap	Cost Of Goods And Services Sold CostOfGoodsAndServicesSold	12062000
CY2021Q2	us-gaap	Cost Of Goods And Services Sold CostOfGoodsAndServicesSold	13021000
CY2021Q3	us-gaap	Cost Of Goods And Services Sold CostOfGoodsAndServicesSold	15129000
CY2020Q4	us-gaap	Gross Profit GrossProfit	7512000
CY2021Q1	us-gaap	Gross Profit GrossProfit	7728000
CY2021Q2	us-gaap	Gross Profit GrossProfit	10079000
CY2021Q3	us-gaap	Gross Profit GrossProfit	9211000
CY2020Q4	us-gaap	Selling General And Administrative Expense SellingGeneralAndAdministrativeExpense	5213000
CY2021Q1	us-gaap	Selling General And Administrative Expense SellingGeneralAndAdministrativeExpense	5688000
CY2021Q2	us-gaap	Selling General And Administrative Expense SellingGeneralAndAdministrativeExpense	7281000
CY2021Q3	us-gaap	Selling General And Administrative Expense SellingGeneralAndAdministrativeExpense	6558000
CY2020Q4	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	1245000
CY2021Q1	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	1869000
CY2021Q2	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	1523000
CY2021Q3	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	1342000
CY2021Q2	us-gaap	Restructuring Charges RestructuringCharges	71000
CY2021Q3	us-gaap	Restructuring Charges RestructuringCharges	15000
CY2020Q4	us-gaap	Operating Income Loss OperatingIncomeLoss	1054000
CY2021Q1	us-gaap	Operating Income Loss OperatingIncomeLoss	171000
CY2021Q2	us-gaap	Operating Income Loss OperatingIncomeLoss	1204000
CY2021Q3	us-gaap	Operating Income Loss OperatingIncomeLoss	1296000
CY2020Q4	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	-255000
CY2021Q1	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	73000
CY2021Q2	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	-155000
CY2021Q3	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	46000
CY2020Q4	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	799000
CY2021Q1	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	244000
CY2021Q2	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	1049000
CY2021Q3	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	1342000
CY2020Q4	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	80000
CY2021Q1	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	490000
CY2021Q2	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	680000
CY2021Q3	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	676000
CY2020Q4	us-gaap	Profit Loss ProfitLoss	719000
CY2021Q1	us-gaap	Profit Loss ProfitLoss	-246000
CY2021Q2	us-gaap	Profit Loss ProfitLoss	369000
CY2021Q3	us-gaap	Profit Loss ProfitLoss	666000
CY2020Q4	asys	Gross Profit Percentage GrossProfitPercentage	0.418
CY2021Q1	asys	Gross Profit Percentage GrossProfitPercentage	0.391
CY2021Q2	asys	Gross Profit Percentage GrossProfitPercentage	0.436
CY2021Q3	asys	Gross Profit Percentage GrossProfitPercentage	0.378
CY2020Q4	asys	Operating Margin Percentage OperatingMarginPercentage	0.059
CY2021Q1	asys	Operating Margin Percentage OperatingMarginPercentage	0.009
CY2021Q2	asys	Operating Margin Percentage OperatingMarginPercentage	0.052
CY2021Q3	asys	Operating Margin Percentage OperatingMarginPercentage	0.053
CY2020Q4	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	0.05
CY2021Q1	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	-0.02
CY2021Q2	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	0.03
CY2021Q3	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	0.05
CY2020Q4	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14072000
CY2021Q1	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14151000
CY2021Q2	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14176000
CY2021Q3	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14190000
CY2020Q4	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	0.05
CY2021Q1	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	-0.02
CY2021Q2	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	0.03
CY2021Q3	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	0.05
CY2020Q4	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14117000
CY2021Q1	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14151000
CY2021Q2	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14373000
CY2021Q3	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14387000
CY2019Q4	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	20692000
CY2020Q1	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	14460000
CY2020Q2	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	15227000
CY2020Q3	us-gaap	Revenue From Contract With Customer Including Assessed Tax RevenueFromContractWithCustomerIncludingAssessedTax	15084000
CY2019Q4	us-gaap	Cost Of Goods And Services Sold CostOfGoodsAndServicesSold	12518000
CY2020Q1	us-gaap	Cost Of Goods And Services Sold CostOfGoodsAndServicesSold	9102000
CY2020Q2	us-gaap	Cost Of Goods And Services Sold CostOfGoodsAndServicesSold	9276000
CY2020Q3	us-gaap	Cost Of Goods And Services Sold CostOfGoodsAndServicesSold	10126000
CY2019Q4	us-gaap	Gross Profit GrossProfit	8174000
CY2020Q1	us-gaap	Gross Profit GrossProfit	5358000
CY2020Q2	us-gaap	Gross Profit GrossProfit	5951000
CY2020Q3	us-gaap	Gross Profit GrossProfit	4958000
CY2019Q4	us-gaap	Selling General And Administrative Expense SellingGeneralAndAdministrativeExpense	5915000
CY2020Q1	us-gaap	Selling General And Administrative Expense SellingGeneralAndAdministrativeExpense	5415000
CY2020Q2	us-gaap	Selling General And Administrative Expense SellingGeneralAndAdministrativeExpense	4804000
CY2020Q3	us-gaap	Selling General And Administrative Expense SellingGeneralAndAdministrativeExpense	5263000
CY2019Q4	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	622000
CY2020Q1	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	915000
CY2020Q2	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	899000
CY2020Q3	asys	Research And Development Net Of Grants Earned ResearchAndDevelopmentNetOfGrantsEarned	876000
CY2020Q2	us-gaap	Restructuring Charges RestructuringCharges	217000
CY2019Q4	us-gaap	Operating Income Loss OperatingIncomeLoss	1637000
CY2020Q1	us-gaap	Operating Income Loss OperatingIncomeLoss	-972000
CY2020Q2	us-gaap	Operating Income Loss OperatingIncomeLoss	31000
CY2020Q3	us-gaap	Operating Income Loss OperatingIncomeLoss	-1181000
CY2019Q4	asys	Gain Loss On Sale Of Business Continuing Operations GainLossOnSaleOfBusinessContinuingOperations	-2793000
CY2019Q4	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	-70000
CY2020Q1	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	595000
CY2020Q2	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	-13000
CY2020Q3	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	-350000
CY2019Q4	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	-1226000
CY2020Q1	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	-377000
CY2020Q2	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	18000
CY2020Q3	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	-1531000
CY2019Q4	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	41000
CY2020Q1	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	166000
CY2020Q2	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	90000
CY2020Q3	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	494000
CY2019Q4	us-gaap	Income Loss From Continuing Operations Including Portion Attributable To Noncontrolling Interest IncomeLossFromContinuingOperationsIncludingPortionAttributableToNoncontrollingInterest	-1267000
CY2020Q1	us-gaap	Income Loss From Continuing Operations Including Portion Attributable To Noncontrolling Interest IncomeLossFromContinuingOperationsIncludingPortionAttributableToNoncontrollingInterest	-543000
CY2020Q2	us-gaap	Income Loss From Continuing Operations Including Portion Attributable To Noncontrolling Interest IncomeLossFromContinuingOperationsIncludingPortionAttributableToNoncontrollingInterest	-72000
CY2020Q3	us-gaap	Income Loss From Continuing Operations Including Portion Attributable To Noncontrolling Interest IncomeLossFromContinuingOperationsIncludingPortionAttributableToNoncontrollingInterest	-2025000
CY2019Q4	us-gaap	Income Loss From Discontinued Operations Net Of Tax IncomeLossFromDiscontinuedOperationsNetOfTax	-665000
CY2020Q1	us-gaap	Income Loss From Discontinued Operations Net Of Tax IncomeLossFromDiscontinuedOperationsNetOfTax	-11151000
CY2019Q4	us-gaap	Profit Loss ProfitLoss	-1932000
CY2020Q1	us-gaap	Profit Loss ProfitLoss	-11694000
CY2020Q2	us-gaap	Profit Loss ProfitLoss	-72000
CY2020Q3	us-gaap	Profit Loss ProfitLoss	-2025000
CY2019Q4	asys	Gross Profit Percentage GrossProfitPercentage	0.395
CY2020Q1	asys	Gross Profit Percentage GrossProfitPercentage	0.371
CY2020Q2	asys	Gross Profit Percentage GrossProfitPercentage	0.391
CY2020Q3	asys	Gross Profit Percentage GrossProfitPercentage	0.329
CY2020Q2	us-gaap	Income Loss From Continuing Operations Per Basic Share IncomeLossFromContinuingOperationsPerBasicShare	-0.01
CY2020Q3	us-gaap	Income Loss From Continuing Operations Per Basic Share IncomeLossFromContinuingOperationsPerBasicShare	-0.14
CY2019Q4	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Basic Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerBasicShare	-0.05
CY2020Q1	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Basic Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerBasicShare	-0.79
CY2020Q3	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14052000
CY2019Q4	asys	Operating Margin Percentage OperatingMarginPercentage	0.079
CY2020Q1	asys	Operating Margin Percentage OperatingMarginPercentage	-0.067
CY2020Q2	asys	Operating Margin Percentage OperatingMarginPercentage	0.002
CY2020Q3	asys	Operating Margin Percentage OperatingMarginPercentage	-0.078
CY2019Q4	us-gaap	Income Loss From Continuing Operations Per Basic Share IncomeLossFromContinuingOperationsPerBasicShare	-0.09
CY2020Q1	us-gaap	Income Loss From Continuing Operations Per Basic Share IncomeLossFromContinuingOperationsPerBasicShare	-0.04
CY2019Q4	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	-0.14
CY2020Q1	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	-0.83
CY2020Q2	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	-0.01
CY2020Q3	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	-0.14
CY2019Q4	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	-0.09
CY2020Q1	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	-0.04
CY2020Q2	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	-0.01
CY2020Q3	us-gaap	Income Loss From Continuing Operations Per Diluted Share IncomeLossFromContinuingOperationsPerDilutedShare	-0.14
CY2019Q4	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Diluted Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerDilutedShare	-0.05
CY2020Q1	us-gaap	Discontinued Operation Income Loss From Discontinued Operation Net Of Tax Per Diluted Share DiscontinuedOperationIncomeLossFromDiscontinuedOperationNetOfTaxPerDilutedShare	-0.79
CY2019Q4	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	-0.14
CY2020Q1	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	-0.83
CY2020Q2	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	-0.01
CY2020Q3	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	-0.14
CY2019Q4	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14290000
CY2020Q1	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14150000
CY2020Q2	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14155000
CY2020Q3	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	14052000
CY2019Q4	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14290000
CY2020Q1	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14150000
CY2020Q2	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	14155000

Files In Submission

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$ASYS
AMTECH SYSTEMS INC Stock $asys

2021 Q3 Form 10-K Financial Statement

#000095017021004729 Filed on November 17, 2021

Income Statement

Balance Sheet

Cashflow Statement

Facts In Submission

Files In Submission

$ASYS AMTECH SYSTEMS INC Stock $asys

2021 Q3 Form 10-K Financial Statement

#000095017021004729 Filed on November 17, 2021

Income Statement

Balance Sheet

Cashflow Statement

Facts In Submission

Files In Submission

$ASYS
AMTECH SYSTEMS INC Stock $asys