| Filed On | Filing |
|---|---|
| 31 Oct 2024 | SEC SCHEDULE 13G |
| 11 Feb 2022 | NONE |
| 11 Feb 2021 | SC 13G |
| 25 Jan 2021 | SC 13G |
| 23 Sep 2019 | BROOKSAUTOMATION |
| 09 Feb 2018 | SCHEDULE 13G |
| 09 Feb 2017 | SCHEDULE 13G |
| 02 Feb 2016 | SCHEDULE 13G |
| 09 Feb 2015 | SCHEDULE 13G |
| 12 Feb 2014 | SCHEDULE 13G |
| 15 Feb 2013 | BROOKS AUTOMATION 13G |
| 13 Feb 2013 | SCHEDULE 13G HOLDINGS REPORT |
| 11 Feb 2013 | SCHEDULE 13G |
| 14 Feb 2012 | POLARIS 13G |
| 10 Feb 2012 | SCHEDULE 13G |
| 11 Feb 2011 | SCHEDULE 13G |
| 10 Feb 2011 | SC 13G |
| 31 Jan 2011 | BROOKS AUTOMATION |
| 08 Feb 2010 | SCHEDULE 13G |
| 29 Jan 2010 | SC 13G |
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