$ONTO
ONTO INNOVATION INC. Stock $onto

$onto Overview Financials Valuation SEC Filings Company Website

2022 Q1 Form 10-K Financial Statement

#000156459022006948 Filed on February 25, 2022

Income Statement

Concept	2022 Q1	2022	2020 Q4
Revenue	$225.6M	$788.9M	$155.1M
YoY Change	33.3%	0.0%	28.65%
Cost Of Revenue	$101.8M	$359.8M	$79.80M
YoY Change	29.24%	0.0%	12.87%
Gross Profit	$123.8M	$429.1M	$75.30M
YoY Change	36.8%	0.0%	90.21%
Gross Profit Margin	54.87%	54.39%	48.55%
Selling, General & Admin	$35.42M	$125.2M	$26.20M
YoY Change	23.41%	0.0%	-17.35%
% of Gross Profit	28.61%	29.18%	34.79%
Research & Development	$24.84M	$96.12M	$21.80M
YoY Change	12.89%	0.0%	190.67%
% of Gross Profit	20.06%	22.4%	28.95%
Depreciation & Amortization	$17.08M	$14.44M	$16.60M
YoY Change	372.17%	-71.9%	90.8%
% of Gross Profit	13.8%	3.36%	22.05%
Operating Expenses	$73.95M	$96.12M	$60.60M
YoY Change	17.38%	-64.75%	24.44%
Operating Profit	$49.86M	$156.4M	$14.70M
YoY Change	81.29%	0.0%	-261.31%
Interest Expense	$47.00K	$1.163M	-$300.0K
YoY Change	-105.22%	-235.71%	-107.89%
% of Operating Profit	0.09%	0.74%	-2.04%
Other Income/Expense, Net	$153.0K	-$1.888M	$100.0K
YoY Change	-112.3%	-1530.3%	-116.67%
Pretax Income	$50.06M	$155.7M	$14.50M
YoY Change	88.16%	0.0%	-164.67%
Income Tax	$3.318M	$13.33M	-$5.400M
% Of Pretax Income	6.63%	8.56%	-37.24%
Net Earnings	$46.74M	$142.3M	$19.90M
YoY Change	93.82%	0.0%	-212.1%
Net Earnings / Revenue	20.71%	18.04%	12.83%
Basic Earnings Per Share		$2.89
Diluted Earnings Per Share	$937.4K	$2.86	$403.7K
COMMON SHARES
Basic Shares Outstanding		49.24M
Diluted Shares Outstanding		49.73M

Balance Sheet

Concept	2022 Q1	2022	2020 Q4
SHORT-TERM ASSETS
Cash & Short-Term Investments	$511.3M	$511.3M	$373.7M
YoY Change	30.15%	0.0%	16.7%
Cash & Equivalents	$169.6M	$169.6M	$136.7M
Short-Term Investments	$341.7M	$341.7M	$237.0M
Other Short-Term Assets	$16.43M	$16.43M	$17.50M
YoY Change	-14.41%	0.0%	-18.98%
Inventory	$243.1M	$243.1M	$191.2M
Prepaid Expenses
Receivables	$177.2M	$177.2M	$149.3M
Other Receivables	$0.00	$0.00	$0.00
Total Short-Term Assets	$948.1M	$948.1M	$731.7M
YoY Change	25.6%	0.0%	14.03%
LONG-TERM ASSETS
Property, Plant & Equipment	$82.09M	$99.58M	$87.95M
YoY Change	-6.37%	0.0%	-10.64%
Goodwill	$315.8M		$306.6M
YoY Change	0.61%		-0.17%
Intangibles	$277.3M		$318.4M
YoY Change	-12.86%		-14.41%
Long-Term Investments
YoY Change
Other Assets	$21.72M	$9.050M	$21.34M
YoY Change	-18.91%	0.0%	-23.63%
Total Long-Term Assets	$701.7M	$701.7M	$736.5M
YoY Change	-6.3%	0.0%	-8.73%
TOTAL ASSETS
Total Short-Term Assets	$948.1M	$948.1M	$731.7M
Total Long-Term Assets	$701.7M	$701.7M	$736.5M
Total Assets	$1.650B	$1.650B	$1.468B
YoY Change	9.72%	0.0%	1.35%
SHORT-TERM LIABILITIES
YoY Change
Accounts Payable	$53.35M	$53.35M	$40.18M
YoY Change	16.93%	0.0%	44.87%
Accrued Expenses	$43.04M	$47.92M	$37.08M
YoY Change	48.81%	0.0%	41.49%
Deferred Revenue	$29.98M		$14.33M
YoY Change	39.93%		13.5%
Short-Term Debt	$0.00	$0.00	$0.00
YoY Change
Long-Term Debt Due
YoY Change
Total Short-Term Liabilities	$154.5M	$154.5M	$120.1M
YoY Change	22.24%	0.0%	40.06%
LONG-TERM LIABILITIES
Long-Term Debt	$0.00	$0.00	$0.00
YoY Change
Other Long-Term Liabilities	$28.95M	$28.95M	$27.71M
YoY Change	0.74%	0.0%	-12.78%
Total Long-Term Liabilities	$28.95M	$28.95M	$27.71M
YoY Change	0.74%	0.0%	-12.78%
TOTAL LIABILITIES
Total Short-Term Liabilities	$154.5M	$154.5M	$120.1M
Total Long-Term Liabilities	$28.95M	$28.95M	$27.71M
Total Liabilities	$223.8M	$223.8M	$203.4M
YoY Change	5.84%	0.0%	10.23%
SHAREHOLDERS EQUITY
Retained Earnings	$168.5M		$26.16M
YoY Change	235.18%		-637.98%
Common Stock	$1.256B		$1.234B
YoY Change	1.35%		-2.79%
Preferred Stock
YoY Change
Treasury Stock (at cost)
YoY Change
Treasury Stock Shares
Shareholders Equity	$1.426B	$1.426B	$1.265B
YoY Change
Total Liabilities & Shareholders Equity	$1.650B	$1.650B	$1.468B
YoY Change	9.72%	0.0%	1.35%

Cashflow Statement

Concept	2022 Q1	2022	2020 Q4
OPERATING ACTIVITIES
Net Income	$46.74M	$142.3M	$19.90M
YoY Change	93.82%	0.0%	-212.1%
Depreciation, Depletion And Amortization	$17.08M	$14.44M	$16.60M
YoY Change	372.17%	-71.9%	90.8%
Cash From Operating Activities	$49.00M	$175.3M	$33.10M
YoY Change	-3.92%	0.0%	72.4%
INVESTING ACTIVITIES
Capital Expenditures	-$863.0K	$12.04M	-$400.0K
YoY Change	-122.27%	0.0%	-112.9%
Acquisitions		$23.80M
YoY Change
Other Investing Activities	-$30.00M	-$129.8M	$1.500M
YoY Change	-46.9%	0.0%	-97.58%
Cash From Investing Activities	-$30.87M	-$141.8M	$1.100M
YoY Change	-48.86%	0.0%	-98.31%
FINANCING ACTIVITIES
Cash Dividend Paid
YoY Change
Common Stock Issuance & Retirement, Net
YoY Change
Debt Paid & Issued, Net
YoY Change
Cash From Financing Activities	3.041M	2.670M	-600.0K
YoY Change	412.82%	0.0%	-90.32%
NET CHANGE
Cash From Operating Activities	49.00M	175.3M	33.10M
Cash From Investing Activities	-30.87M	-141.8M	1.100M
Cash From Financing Activities	3.041M	2.670M	-600.0K
Net Change In Cash	21.18M	36.16M	33.60M
YoY Change	-306.2%	0.0%	-56.92%
FREE CASH FLOW
Cash From Operating Activities	$49.00M	$175.3M	$33.10M
Capital Expenditures	-$863.0K	$12.04M	-$400.0K
Free Cash Flow	$49.86M	$163.2M	$33.50M
YoY Change	5.81%	0.0%	108.07%

Facts In Submission

Frame	Concept Type	Concept / XBRL Key	Value
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CY2022Q1	us-gaap	Commitments And Contingencies CommitmentsAndContingencies
CY2020Q4	us-gaap	Commitments And Contingencies CommitmentsAndContingencies
CY2022Q1	us-gaap	Operating Lease Weighted Average Remaining Lease Term1 OperatingLeaseWeightedAverageRemainingLeaseTerm1	P5Y3M18D
CY2022Q1	us-gaap	Operating Lease Liability Statement Of Financial Position Extensible List OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList	http://fasb.org/us-gaap/2021-01-31#OperatingLeaseLiability
CY2022Q1	us-gaap	Operating Lease Right Of Use Asset Statement Of Financial Position Extensible List OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList	http://fasb.org/us-gaap/2021-01-31#OtherAssetsNoncurrent
CY2020Q4	us-gaap	Operating Lease Right Of Use Asset Statement Of Financial Position Extensible List OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList	http://fasb.org/us-gaap/2021-01-31#OtherAssetsNoncurrent
CY2022Q1	us-gaap	Operating Lease Liability Noncurrent Statement Of Financial Position Extensible List OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList	http://fasb.org/us-gaap/2021-01-31#OperatingLeaseLiabilityNoncurrent
CY2020Q4	us-gaap	Operating Lease Liability Noncurrent Statement Of Financial Position Extensible List OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList	http://fasb.org/us-gaap/2021-01-31#OperatingLeaseLiabilityNoncurrent
CY2022	dei	Icfr Auditor Attestation Flag IcfrAuditorAttestationFlag	true
CY2022	dei	Auditor Firm AuditorFirmId	42
CY2022	dei	Auditor Name AuditorName	Ernst & Young LLP
CY2022	dei	Auditor Location AuditorLocation	Iselin, New Jersey
CY2022	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	788899000
CY2020	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	556496000
CY2022	us-gaap	Cost Of Revenue CostOfRevenue	359813000
CY2019	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	305896000
CY2020	us-gaap	Cost Of Revenue CostOfRevenue	278043000
CY2019	us-gaap	Cost Of Revenue CostOfRevenue	170868000
CY2022	us-gaap	Gross Profit GrossProfit	429086000
CY2020	us-gaap	Gross Profit GrossProfit	278453000
CY2019	us-gaap	Gross Profit GrossProfit	135028000
CY2022	us-gaap	Research And Development Expense ResearchAndDevelopmentExpense	96118000
CY2020	us-gaap	Research And Development Expense ResearchAndDevelopmentExpense	84584000
CY2019	us-gaap	Research And Development Expense ResearchAndDevelopmentExpense	48358000
CY2020	us-gaap	Selling And Marketing Expense SellingAndMarketingExpense	48136000
CY2019	us-gaap	Selling And Marketing Expense SellingAndMarketingExpense	28251000
CY2019	us-gaap	General And Administrative Expense GeneralAndAdministrativeExpense	53017000
CY2022	us-gaap	Operating Income Loss OperatingIncomeLoss	156407000
CY2022	us-gaap	Interest Income Expense Nonoperating Net InterestIncomeExpenseNonoperatingNet	1163000
CY2020	us-gaap	Interest Income Expense Nonoperating Net InterestIncomeExpenseNonoperatingNet	2899000
CY2022	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	-1888000
CY2020	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	-2708000
CY2019	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	780000
CY2022	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	155682000
CY2020	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	26868000
CY2019	us-gaap	Income Loss From Continuing Operations Before Income Taxes Extraordinary Items Noncontrolling Interest IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest	-597000
CY2022	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	13333000
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CY2019	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	-2507000
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CY2020	us-gaap	Net Income Loss NetIncomeLoss	31025000
CY2019	us-gaap	Net Income Loss NetIncomeLoss	1910000
CY2022	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	2.89
CY2020	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	0.63
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CY2022	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	49242000
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CY2022	us-gaap	Increase Decrease In Accounts Receivable IncreaseDecreaseInAccountsReceivable	27829000
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CY2020	us-gaap	Increase Decrease In Inventories IncreaseDecreaseInInventories	42409000
CY2019	us-gaap	Increase Decrease In Inventories IncreaseDecreaseInInventories	9338000
CY2022	us-gaap	Increase Decrease In Prepaid Deferred Expense And Other Assets IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets	768000
CY2020	us-gaap	Increase Decrease In Prepaid Deferred Expense And Other Assets IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets	-11409000
CY2019	us-gaap	Increase Decrease In Prepaid Deferred Expense And Other Assets IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets	5079000
CY2022	us-gaap	Increase Decrease In Accounts Payable IncreaseDecreaseInAccountsPayable	12142000
CY2020	us-gaap	Increase Decrease In Accounts Payable IncreaseDecreaseInAccountsPayable	11403000
CY2019	us-gaap	Increase Decrease In Accounts Payable IncreaseDecreaseInAccountsPayable	-12138000
CY2022	us-gaap	Increase Decrease In Accrued Liabilities And Other Operating Liabilities IncreaseDecreaseInAccruedLiabilitiesAndOtherOperatingLiabilities	21694000
CY2020	us-gaap	Increase Decrease In Accrued Liabilities And Other Operating Liabilities IncreaseDecreaseInAccruedLiabilitiesAndOtherOperatingLiabilities	17867000
CY2019	us-gaap	Increase Decrease In Accrued Liabilities And Other Operating Liabilities IncreaseDecreaseInAccruedLiabilitiesAndOtherOperatingLiabilities	-6685000
CY2022	us-gaap	Net Cash Provided By Used In Operating Activities NetCashProvidedByUsedInOperatingActivities	175281000
CY2020	us-gaap	Net Cash Provided By Used In Operating Activities NetCashProvidedByUsedInOperatingActivities	105984000
CY2019	us-gaap	Net Cash Provided By Used In Operating Activities NetCashProvidedByUsedInOperatingActivities	18146000
CY2022	us-gaap	Payments To Acquire Marketable Securities PaymentsToAcquireMarketableSecurities	361022000
CY2020	us-gaap	Payments To Acquire Marketable Securities PaymentsToAcquireMarketableSecurities	313027000
CY2019	us-gaap	Payments To Acquire Marketable Securities PaymentsToAcquireMarketableSecurities	127462000
CY2022	us-gaap	Proceeds From Sale And Maturity Of Marketable Securities ProceedsFromSaleAndMaturityOfMarketableSecurities	255063000
CY2020	us-gaap	Proceeds From Sale And Maturity Of Marketable Securities ProceedsFromSaleAndMaturityOfMarketableSecurities	265409000
CY2019	us-gaap	Proceeds From Sale And Maturity Of Marketable Securities ProceedsFromSaleAndMaturityOfMarketableSecurities	94486000
CY2022	us-gaap	Payments To Acquire Property Plant And Equipment PaymentsToAcquirePropertyPlantAndEquipment	12039000
CY2020	us-gaap	Payments To Acquire Property Plant And Equipment PaymentsToAcquirePropertyPlantAndEquipment	3829000
CY2019	us-gaap	Payments To Acquire Property Plant And Equipment PaymentsToAcquirePropertyPlantAndEquipment	6802000
CY2022	us-gaap	Payments To Acquire Businesses Net Of Cash Acquired PaymentsToAcquireBusinessesNetOfCashAcquired	23795000
CY2019	us-gaap	Cash Acquired From Acquisition CashAcquiredFromAcquisition	43882000
CY2020	onto	Cash Received From Convertible Note Receivable CashReceivedFromConvertibleNoteReceivable	2848000
CY2022	us-gaap	Net Cash Provided By Used In Investing Activities NetCashProvidedByUsedInInvestingActivities	-141793000
CY2020	us-gaap	Net Cash Provided By Used In Investing Activities NetCashProvidedByUsedInInvestingActivities	-48599000
CY2019	us-gaap	Net Cash Provided By Used In Investing Activities NetCashProvidedByUsedInInvestingActivities	4104000
CY2020	us-gaap	Payments For Repurchase Of Common Stock PaymentsForRepurchaseOfCommonStock	52000000
CY2019	us-gaap	Payments For Repurchase Of Common Stock PaymentsForRepurchaseOfCommonStock	744000
CY2022	us-gaap	Payments Related To Tax Withholding For Share Based Compensation PaymentsRelatedToTaxWithholdingForShareBasedCompensation	7403000
CY2020	us-gaap	Payments Related To Tax Withholding For Share Based Compensation PaymentsRelatedToTaxWithholdingForShareBasedCompensation	4052000
CY2019	us-gaap	Payments Related To Tax Withholding For Share Based Compensation PaymentsRelatedToTaxWithholdingForShareBasedCompensation	2540000
CY2020	us-gaap	Payment For Contingent Consideration Liability Financing Activities PaymentForContingentConsiderationLiabilityFinancingActivities	569000
CY2019	us-gaap	Payment For Contingent Consideration Liability Financing Activities PaymentForContingentConsiderationLiabilityFinancingActivities	1758000
CY2022	us-gaap	Net Cash Provided By Used In Financing Activities NetCashProvidedByUsedInFinancingActivities	2670000
CY2022	us-gaap	Effect Of Exchange Rate On Cash And Cash Equivalents EffectOfExchangeRateOnCashAndCashEquivalents	-3276000
CY2020	us-gaap	Effect Of Exchange Rate On Cash And Cash Equivalents EffectOfExchangeRateOnCashAndCashEquivalents	2364000
CY2020	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents Period Increase Decrease Including Exchange Rate Effect CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect	6047000
CY2019	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents Period Increase Decrease Including Exchange Rate Effect CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect	18285000
CY2022Q1	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	169602000
CY2020Q4	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	136720000
CY2019Q4	us-gaap	Cash Cash Equivalents Restricted Cash And Restricted Cash Equivalents CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents	130673000
CY2022	us-gaap	Income Taxes Paid Net IncomeTaxesPaidNet	23766000
CY2020	us-gaap	Income Taxes Paid Net IncomeTaxesPaidNet	6415000
CY2019	us-gaap	Income Taxes Paid Net IncomeTaxesPaidNet	-3848000
CY2019	us-gaap	Stock Issued During Period Value Acquisitions StockIssuedDuringPeriodValueAcquisitions	890131000
CY2019	us-gaap	Stock Issued During Period Value Share Based Compensation StockIssuedDuringPeriodValueShareBasedCompensation	2131000
CY2019	us-gaap	Stock Repurchased During Period Value StockRepurchasedDuringPeriodValue	744000
CY2019	us-gaap	Net Income Loss NetIncomeLoss	1910000
CY2019	us-gaap	Adjustments To Additional Paid In Capital Sharebased Compensation Requisite Service Period Recognition Value AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue	10585000
CY2019	us-gaap	Adjustments To Additional Paid In Capital Income Tax Deficiency From Share Based Compensation AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensation	2540000
CY2019	us-gaap	Other Comprehensive Income Foreign Currency Transaction And Translation Adjustment Net Of Tax Portion Attributable To Parent OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent	709000
CY2019	us-gaap	Other Comprehensive Income Unrealized Holding Gain Loss On Securities Arising During Period Net Of Tax OtherComprehensiveIncomeUnrealizedHoldingGainLossOnSecuritiesArisingDuringPeriodNetOfTax	-44000
CY2020	us-gaap	Stock Repurchased During Period Value StockRepurchasedDuringPeriodValue	52000000
CY2022	us-gaap	Nature Of Operations NatureOfOperations	<div style="align:left;"> <table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse; width:100%;"> <tr> <td style="width:4.69%;white-space:nowrap" valign="top"> <p style="text-align:justify;margin-top:14pt;margin-bottom:0pt;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><span style="font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">1.</span></p></td> <td valign="top"> <p style="text-align:justify;margin-top:14pt;margin-bottom:0pt;font-weight:bold;font-style:normal;text-transform:none;font-variant: normal;font-family:Times New Roman;font-size:10pt;">Organization and Nature of Operations:</p></td></tr></table></div> <p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;text-indent:4.55%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Onto Innovation Inc. (“Onto Innovation” or the “Company”) is a worldwide leader in the design, development, manufacture and support of process control tools that perform macro-defect inspection and metrology, lithography systems, and process control analytical software used by semiconductor and advanced packaging device manufacturers. The Company delivers comprehensive solutions throughout the semiconductor fabrication process with our families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market of their devices. The Company provides process and yield management solutions used in both wafer processing facilities, often referred to as “front-end” manufacturing, and in device packaging and test facilities, commonly referred to as “back-end” manufacturing. The Company’s advanced process control software portfolio includes powerful solutions for standalone tools, groups of tools, or factory-wide suites to enhance productivity and achieve significant cost savings. Onto Innovation’s systems are backed by worldwide customer service and applications support. The Company has branch sales and service offices or subsidiaries in Korea, Japan, China, Taiwan, Singapore and in several countries in Europe. The Company operates in a single reportable segment and is a provider of process characterization equipment and software for wafer fabs and advanced packaging facilities. </p>
CY2022	us-gaap	Fiscal Period FiscalPeriod	<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Fiscal Year.<span style="font-weight:normal;"> In the first quarter of 2020, the Company changed its fiscal year end from December 31 to a 52-53 week fiscal year ending on the Saturday closest to December 31. The Company made the fiscal year change on a prospective basis and has not adjusted operating results for prior periods. The fiscal year of 2021 began on December 27, 2020 and ended January 1, 2022. The fiscal year of 2020 began on January 1, 2020 and ended December 26, 2020. Financial statements for 2019 continue to be presented on the basis of our previous calendar year end.</span></p>
CY2022	us-gaap	Use Of Estimates UseOfEstimates	<p style="text-align:justify;margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Use of<span style="font-weight:normal;"> </span>Estimates. <span style="font-weight:normal;">The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities as of the date of the financial statements and the reported amounts of revenue and expenses during the reporting period. Significant estimates made by management include the allowance for credit losses, excess and obsolete inventory, fair value of assets acquired and liabilities assumed in a business combination, recoverability and useful lives of property, plant and equipment and identifiable intangible assets, recoverability of goodwill, </span></p> <p style="text-align:justify;margin-top:12pt;margin-bottom:0pt;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><span style="font-weight:normal;">recoverability of deferred tax assets, liabilities for product warranty, contingencies, including litigation reserves and share-based payments and liabilities for tax uncertainties. Actual results could differ from those estimates.</span></p> <p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;text-indent:4.55%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">These estimates and assumptions are based on historical experience and on various other factors which the Company believes to be reasonable under the circumstances. The Company may engage third-party valuation specialists to assist with estimates related to the valuation of financial instruments, assets and stock awards associated with various contractual arrangements. Such estimates often require the selection of appropriate valuation methodologies and significant judgment. Actual results could differ from these estimates under different assumptions or circumstances and such differences could be material.</p>
CY2022	us-gaap	Property Plant And Equipment Depreciation Methods PropertyPlantAndEquipmentDepreciationMethods	straight-line method
CY2022	us-gaap	Impairment Of Long Lived Assets Held For Use ImpairmentOfLongLivedAssetsHeldForUse	0
CY2020	us-gaap	Impairment Of Long Lived Assets Held For Use ImpairmentOfLongLivedAssetsHeldForUse	0
CY2022	us-gaap	Number Of Operating Segments NumberOfOperatingSegments	1
CY2022	us-gaap	Goodwill Impairment Loss GoodwillImpairmentLoss	0
CY2020	us-gaap	Goodwill Impairment Loss GoodwillImpairmentLoss	0
CY2019	us-gaap	Goodwill Impairment Loss GoodwillImpairmentLoss	0
CY2022	us-gaap	Goodwill Impairment Loss GoodwillImpairmentLoss	0
CY2022	us-gaap	Concentration Risk Credit Risk ConcentrationRiskCreditRisk	<p style="text-align:justify;margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Concentration of Credit Risk. <span style="font-weight:normal;">Financial instruments, which potentially subject the Company to concentrations of credit risk, consist primarily of accounts receivable, cash and cash equivalents and marketable securities. </span></p> <p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;text-indent:4.55%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">The Company maintains cash and cash equivalents and marketable <span style="Background-color:#FFFFFF;color:#000000;">securities</span> with higher credit quality issuers and monitors the amount of credit exposure to any one issuer. The Company's investment policy provides guidelines and limits regarding credit quality, investment concentration, investment type, and maturity that the Company believes will provide liquidity while reducing risk of loss of capital. Investments are of a short-term nature and include investments in commercial paper, corporate debt securities, asset-backed securities, U.S. Treasury, U.S. Government, and U.S. Agency debt.</p> <p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;text-indent:4.55%;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><span style="Background-color:#FFFFFF;">The Company’s accounts receivable result primarily from the sale of semiconductor equipment, related accessories and replacement parts. The Company’s customer base is highly concentrated and historically, a relatively small number of customers have accounted for a significant portion of its revenues. Write-offs of uncollectible accounts have historically not been material. The Company actively monitors its customers' financial strength to reduce the risk of loss.</span></p>
CY2022Q1	us-gaap	Accumulated Other Comprehensive Income Loss Foreign Currency Translation Adjustment Net Of Tax AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax	-1764000
CY2020Q4	us-gaap	Accumulated Other Comprehensive Income Loss Foreign Currency Translation Adjustment Net Of Tax AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax	-4479000
CY2022	us-gaap	Derivatives Methods Of Accounting Hedging Derivatives DerivativesMethodsOfAccountingHedgingDerivatives	<p style="text-align:justify;margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Derivative Instruments and Hedging Activities<span style="font-style:italic;font-weight:normal;">. </span><span style="font-weight:normal;">The Company’s policy is to mitigate the effect of exchange rate fluctuations on certain foreign currency denominated business exposures. The Company has a policy that allows for the use of derivative financial instruments to hedge foreign currency exchange rate fluctuations on forecasted revenue and net monetary assets or liabilities denominated in various foreign currencies. The Company carries derivative financial instruments (derivatives) on the balance sheet at their fair values, in either prepaid expenses and other current assets or other current liabilities in the Consolidated Balance Sheets. The Company does not use derivatives for trading or speculative purposes. The Company does not believe that it is exposed to more than a nominal amount of credit risk in its foreign currency hedges, as counterparties are large, global and well-capitalized financial institutions. The Company’s exposures are in liquid currencies (Japanese yen, euros, Korean won, Taiwanese dollars, Chinese renminbi, British pound sterling, Singapore dollars and Israeli shekel), so there is minimal risk that appropriate derivatives to maintain the Company’s hedging program would not be available in the future.</span></p> <p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;text-indent:4.55%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">To hedge foreign currency risks, the Company uses foreign currency exchange forward contracts, where possible and prudent. These hedge contracts are valued using standard valuation formulas with assumptions about future foreign currency exchange rates derived from existing exchange rates, interest rates, and other market factors.</p> <p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;text-indent:4.55%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">The dollar equivalent of the U.S. dollar forward contracts and related fair values as of January 1, 2022 and December 26, 2020 were as follows:</p> <div> <table border="0" cellpadding="0" cellspacing="0" style="margin:auto;border-collapse:collapse; width:100%;"> <tr> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:66.7%;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1.72%;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td colspan="2" style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:13.9%;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">January 1,</p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1.72%;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td colspan="2" style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:13.9%;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">December 26,</p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> </tr> <tr> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;width:66.7%; border-bottom:solid 0.75pt transparent;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;width:1.72%; border-bottom:solid 0.75pt transparent;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td colspan="2" style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:13.9%; border-bottom:solid 0.75pt #000000;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">2022</p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%; border-bottom:solid 0.75pt #000000;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;width:1.72%;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td colspan="2" style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:13.9%; border-bottom:solid 0.75pt #000000;" valign="bottom"> <p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">2020</p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;width:1%;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> </tr> <tr> <td style="background-color:#CFF0FC;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:66.7%;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Notional amount</p></td> <td style="background-color:#CFF0FC;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1.72%;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#CFF0FC;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%; border-top:solid 0.75pt #000000;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">$</p></td> <td style="background-color:#CFF0FC;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:12.9%; border-top:solid 0.75pt #000000;white-space:nowrap;" valign="bottom"> <p style="text-align:right;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">32,293</p></td> <td style="background-color:#CFF0FC;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%; border-top:solid 0.75pt #000000;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#CFF0FC;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1.72%;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#CFF0FC;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%; border-top:solid 0.75pt #000000;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">$</p></td> <td style="background-color:#CFF0FC;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:12.9%; border-top:solid 0.75pt #000000;white-space:nowrap;" valign="bottom"> <p style="text-align:right;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">37,580</p></td> <td style="background-color:#CFF0FC;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> </tr> <tr> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:66.7%;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Fair value of liability</p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1.72%;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:12.9%;white-space:nowrap;" valign="bottom"> <p style="text-align:right;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">26</p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;"> </p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1.72%;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> </p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:12.9%;white-space:nowrap;" valign="bottom"> <p style="text-align:right;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">36</p></td> <td style="background-color:#FFFFFF;padding-left:0pt;padding-Right:0.75pt;padding-Top:0.75pt;padding-Bottom:0pt;width:1%;white-space:nowrap;" valign="bottom"> <p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;"> </p></td> </tr> </table></div> <p style="text-align:justify;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;"> </p> <p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;text-indent:4.55%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"> During the year ended January 1, 2022, the Company recognized a loss of $1,650 on maturities of forward contracts. During the years ended December 26, 2020 and December 31, 2019, the Company recognized gains of $510 and $343 on maturities of forward contracts, respectively. The aggregate notional amounts of matured contracts were $420,460, $373,749 and $58,522 for 2021, 2020 and 2019, respectively.</p>
CY2022Q1	us-gaap	Derivative Notional Amount DerivativeNotionalAmount	32293000
CY2020Q4	us-gaap	Derivative Notional Amount DerivativeNotionalAmount	37580000
CY2022Q1	us-gaap	Fair Value Net Asset Liability FairValueNetAssetLiability	-26000
CY2020Q4	us-gaap	Fair Value Net Asset Liability FairValueNetAssetLiability	-36000
CY2022	us-gaap	Derivative Gain Loss On Derivative Net DerivativeGainLossOnDerivativeNet	-1650000
CY2020	us-gaap	Derivative Gain Loss On Derivative Net DerivativeGainLossOnDerivativeNet	510000
CY2019	us-gaap	Derivative Gain Loss On Derivative Net DerivativeGainLossOnDerivativeNet	343000
CY2022Q1	us-gaap	Goodwill Impaired Accumulated Impairment Loss GoodwillImpairedAccumulatedImpairmentLoss	0
CY2020	us-gaap	Goodwill Purchase Accounting Adjustments GoodwillPurchaseAccountingAdjustments	-516000
CY2020Q4	us-gaap	Goodwill Goodwill	306632000
CY2022Q1	us-gaap	Goodwill Goodwill	315811000
CY2022Q1	us-gaap	Intangible Assets Net Excluding Goodwill IntangibleAssetsNetExcludingGoodwill	277281000
CY2020Q4	us-gaap	Finite Lived Intangible Assets Gross FiniteLivedIntangibleAssetsGross	408599000
CY2020Q4	us-gaap	Finite Lived Intangible Assets Accumulated Amortization FiniteLivedIntangibleAssetsAccumulatedAmortization	136842000
CY2020Q4	us-gaap	Finite Lived Intangible Assets Net FiniteLivedIntangibleAssetsNet	271757000
CY2020Q4	us-gaap	Intangible Assets Net Excluding Goodwill IntangibleAssetsNetExcludingGoodwill	318357000
CY2022	us-gaap	Amortization Of Intangible Assets AmortizationOfIntangibleAssets	51366000
CY2022Q1	us-gaap	Finite Lived Intangible Assets Amortization Expense Next Twelve Months FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths	55273000
CY2022Q1	us-gaap	Finite Lived Intangible Assets Amortization Expense Year Two FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo	54798000
CY2022Q1	us-gaap	Finite Lived Intangible Assets Amortization Expense Year Three FiniteLivedIntangibleAssetsAmortizationExpenseYearThree	49113000
CY2022Q1	us-gaap	Debt Securities Available For Sale Continuous Unrealized Loss Position Less Than12 Months DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months	242432000
CY2022Q1	us-gaap	Debt Securities Available For Sale Continuous Unrealized Loss Position12 Months Or Longer DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger	2587000
CY2020Q4	us-gaap	Debt Securities Available For Sale Continuous Unrealized Loss Position Less Than12 Months DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12Months	32450000
CY2020Q4	us-gaap	Debt Securities Available For Sale Continuous Unrealized Loss Position Less Than12 Months Accumulated Loss DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPositionLessThan12MonthsAccumulatedLoss	19000
CY2020Q4	us-gaap	Debt Securities Available For Sale Continuous Unrealized Loss Position12 Months Or Longer DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLonger	0
CY2020Q4	us-gaap	Debt Securities Available For Sale Continuous Unrealized Loss Position12 Months Or Longer Accumulated Loss DebtSecuritiesAvailableForSaleContinuousUnrealizedLossPosition12MonthsOrLongerAccumulatedLoss	0
CY2022Q1	us-gaap	Finite Lived Intangible Assets Amortization Expense Year Four FiniteLivedIntangibleAssetsAmortizationExpenseYearFour	32563000
CY2022Q1	us-gaap	Finite Lived Intangible Assets Amortization Expense Year Five FiniteLivedIntangibleAssetsAmortizationExpenseYearFive	31370000
CY2022	us-gaap	Lessee Operating Lease Option To Extend LesseeOperatingLeaseOptionToExtend	options to extend
CY2022Q1	us-gaap	Lessee Operating Lease Term Of Contract LesseeOperatingLeaseTermOfContract	P1Y
CY2022Q1	us-gaap	Accrued Liabilities Current AccruedLiabilitiesCurrent	43042000
CY2022	us-gaap	Operating Lease Payments OperatingLeasePayments	6247000
CY2022	us-gaap	Operating Lease Cost OperatingLeaseCost	5964000
CY2022	us-gaap	Right Of Use Asset Obtained In Exchange For Operating Lease Liability RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability	304000
CY2022Q1	us-gaap	Operating Lease Weighted Average Discount Rate Percent OperatingLeaseWeightedAverageDiscountRatePercent	0.045
CY2022Q1	us-gaap	Lessee Operating Lease Liability Payments Due Next Twelve Months LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths	5029000
CY2022Q1	us-gaap	Lessee Operating Lease Liability Payments Due Year Two LesseeOperatingLeaseLiabilityPaymentsDueYearTwo	4058000
CY2022Q1	us-gaap	Lessee Operating Lease Liability Payments Due Year Three LesseeOperatingLeaseLiabilityPaymentsDueYearThree	3457000
CY2022Q1	us-gaap	Lessee Operating Lease Liability Payments Due Year Four LesseeOperatingLeaseLiabilityPaymentsDueYearFour	3342000
CY2022Q1	us-gaap	Lessee Operating Lease Liability Payments Due Year Five LesseeOperatingLeaseLiabilityPaymentsDueYearFive	1919000
CY2022Q1	us-gaap	Lessee Operating Lease Liability Payments Due After Year Five LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive	3299000
CY2022Q1	us-gaap	Lessee Operating Lease Liability Payments Due LesseeOperatingLeaseLiabilityPaymentsDue	21104000
CY2022Q1	us-gaap	Lessee Operating Lease Liability Undiscounted Excess Amount LesseeOperatingLeaseLiabilityUndiscountedExcessAmount	2402000
CY2022Q1	us-gaap	Operating Lease Liability OperatingLeaseLiability	18702000
CY2022Q1	us-gaap	Inventory Raw Materials Net Of Reserves InventoryRawMaterialsNetOfReserves	157343000
CY2022Q1	us-gaap	Inventory Work In Process Net Of Reserves InventoryWorkInProcessNetOfReserves	60415000
CY2022Q1	us-gaap	Inventory Finished Goods Net Of Reserves InventoryFinishedGoodsNetOfReserves	25350000
CY2022Q1	us-gaap	Inventory Net InventoryNet	243108000
CY2022Q1	us-gaap	Property Plant And Equipment Gross PropertyPlantAndEquipmentGross	128623000
CY2022Q1	us-gaap	Accumulated Depreciation Depletion And Amortization Property Plant And Equipment AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment	46529000
CY2022Q1	us-gaap	Property Plant And Equipment Net PropertyPlantAndEquipmentNet	82094000
CY2022	us-gaap	Depreciation Depreciation	14435000
CY2022Q1	us-gaap	Operating Lease Right Of Use Asset OperatingLeaseRightOfUseAsset	17488000
CY2020Q4	us-gaap	Operating Lease Right Of Use Asset OperatingLeaseRightOfUseAsset	19669000
CY2022Q1	us-gaap	Employee Related Liabilities Current EmployeeRelatedLiabilitiesCurrent	32581000
CY2022Q1	us-gaap	Product Warranty Accrual Classified Current ProductWarrantyAccrualClassifiedCurrent	9093000
CY2022Q1	us-gaap	Other Accrued Liabilities Current OtherAccruedLiabilitiesCurrent	1368000
CY2022Q1	us-gaap	Contract With Customer Refund Liability Current ContractWithCustomerRefundLiabilityCurrent	9459000
CY2020Q4	us-gaap	Contract With Customer Refund Liability Current ContractWithCustomerRefundLiabilityCurrent	15177000
CY2022Q1	us-gaap	Operating Lease Liability Current OperatingLeaseLiabilityCurrent	3968000
CY2020Q4	us-gaap	Operating Lease Liability Current OperatingLeaseLiabilityCurrent	4470000
CY2022Q1	us-gaap	Taxes Payable Current TaxesPayableCurrent	6315000
CY2020Q4	us-gaap	Taxes Payable Current TaxesPayableCurrent	4109000
CY2022Q1	us-gaap	Accrued Professional Fees Current AccruedProfessionalFeesCurrent	912000
CY2020Q4	us-gaap	Accrued Professional Fees Current AccruedProfessionalFeesCurrent	1184000
CY2022Q1	us-gaap	Other Sundry Liabilities Current OtherSundryLiabilitiesCurrent	7506000
CY2020Q4	us-gaap	Other Sundry Liabilities Current OtherSundryLiabilitiesCurrent	3559000
CY2022Q1	us-gaap	Other Liabilities Current OtherLiabilitiesCurrent	28160000
CY2020Q4	us-gaap	Other Liabilities Current OtherLiabilitiesCurrent	28499000
CY2022Q1	us-gaap	Operating Lease Liability Noncurrent OperatingLeaseLiabilityNoncurrent	13754000
CY2020Q4	us-gaap	Operating Lease Liability Noncurrent OperatingLeaseLiabilityNoncurrent	16455000
CY2022Q1	onto	Unrecognized Tax Benefits Including Interest Noncurrent UnrecognizedTaxBenefitsIncludingInterestNoncurrent	7861000
CY2020Q4	onto	Unrecognized Tax Benefits Including Interest Noncurrent UnrecognizedTaxBenefitsIncludingInterestNoncurrent	3812000
CY2022Q1	us-gaap	Contract With Customer Liability Noncurrent ContractWithCustomerLiabilityNoncurrent	1693000
CY2020Q4	us-gaap	Contract With Customer Liability Noncurrent ContractWithCustomerLiabilityNoncurrent	1292000
CY2022Q1	us-gaap	Other Sundry Liabilities Noncurrent OtherSundryLiabilitiesNoncurrent	5643000
CY2020Q4	us-gaap	Other Sundry Liabilities Noncurrent OtherSundryLiabilitiesNoncurrent	6153000
CY2022Q1	us-gaap	Other Liabilities Noncurrent OtherLiabilitiesNoncurrent	28951000
CY2020Q4	us-gaap	Other Liabilities Noncurrent OtherLiabilitiesNoncurrent	27712000
CY2022	onto	Proceeds From Accounts Receivable ProceedsFromAccountsReceivable	20384000
CY2022Q1	onto	Due From Unrelated Third Parties DueFromUnrelatedThirdParties	0
CY2022Q1	onto	Intellectual Property Indemnification Obligations IntellectualPropertyIndemnificationObligations	0
CY2022	us-gaap	Standard Product Warranty Accrual Additions From Business Acquisition StandardProductWarrantyAccrualAdditionsFromBusinessAcquisition	407000
CY2022	us-gaap	Product Warranty Accrual Payments ProductWarrantyAccrualPayments	9102000
CY2020	us-gaap	Product Warranty Accrual Payments ProductWarrantyAccrualPayments	7570000
CY2022Q1	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	9682000
CY2020Q4	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	6485000
CY2022Q1	us-gaap	Purchase Commitment Remaining Minimum Amount Committed PurchaseCommitmentRemainingMinimumAmountCommitted	373638000
CY2022Q1	onto	Purchase Commitment Remaining Minimum Amount Committed Less Than One Year PurchaseCommitmentRemainingMinimumAmountCommittedLessThanOneYear	345334000
CY2022	onto	Maximum Borrowing Capacity Percentage Of Eligible Securities Held At Line Of Credit Accessed MaximumBorrowingCapacityPercentageOfEligibleSecuritiesHeldAtLineOfCreditAccessed	0.70
CY2022Q1	us-gaap	Line Of Credit Facility Remaining Borrowing Capacity LineOfCreditFacilityRemainingBorrowingCapacity	131402000
CY2022Q1	us-gaap	Line Of Credit Facility Interest Rate At Period End LineOfCreditFacilityInterestRateAtPeriodEnd	0.018
CY2020Q4	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	6485000
CY2019Q4	us-gaap	Standard Product Warranty Accrual StandardProductWarrantyAccrual	6348000
CY2022	us-gaap	Product Warranty Accrual Warranties Issued ProductWarrantyAccrualWarrantiesIssued	11892000
CY2020	us-gaap	Product Warranty Accrual Warranties Issued ProductWarrantyAccrualWarrantiesIssued	7707000
CY2022	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	788899000
CY2020	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	556496000
CY2022Q1	us-gaap	Contract With Customer Liability Noncurrent ContractWithCustomerLiabilityNoncurrent	1693000
CY2020Q4	us-gaap	Contract With Customer Liability Noncurrent ContractWithCustomerLiabilityNoncurrent	1292000
CY2021Q1	us-gaap	Contract With Customer Liability ContractWithCustomerLiability	15627000
CY2019Q4	us-gaap	Contract With Customer Liability ContractWithCustomerLiability	15093000
CY2022	us-gaap	Contract With Customer Liability Cumulative Catch Up Adjustment To Revenue Change In Measure Of Progress ContractWithCustomerLiabilityCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress	69656000
CY2020	us-gaap	Contract With Customer Liability Cumulative Catch Up Adjustment To Revenue Change In Measure Of Progress ContractWithCustomerLiabilityCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress	43398000
CY2022	onto	Contract With Customer Liability Revenue Recognized Including Additions ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions	53997000
CY2020	onto	Contract With Customer Liability Revenue Recognized Including Additions ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions	42864000
CY2022Q1	us-gaap	Contract With Customer Liability ContractWithCustomerLiability	31672000
CY2020Q4	us-gaap	Contract With Customer Liability ContractWithCustomerLiability	15627000
CY2022	us-gaap	Stock Issued During Period Shares Employee Stock Purchase Plans StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans	242000
CY2020	us-gaap	Stock Issued During Period Shares Employee Stock Purchase Plans StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans	91000
CY2019	us-gaap	Stock Issued During Period Shares Employee Stock Purchase Plans StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans	72000
CY2022Q1	onto	Employee Stock Purchase Plan Available EmployeeStockPurchasePlanAvailable	1258000
CY2020	us-gaap	Allocated Share Based Compensation Expense AllocatedShareBasedCompensationExpense	17662000
CY2019	us-gaap	Allocated Share Based Compensation Expense AllocatedShareBasedCompensationExpense	10585000
CY2022	us-gaap	Employee Service Share Based Compensation Tax Benefit From Compensation Expense EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense	4255000
CY2020	us-gaap	Employee Service Share Based Compensation Tax Benefit From Compensation Expense EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense	3849000
CY2019	us-gaap	Employee Service Share Based Compensation Tax Benefit From Compensation Expense EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense	2283000
CY2022	us-gaap	Allocated Share Based Compensation Expense Net Of Tax AllocatedShareBasedCompensationExpenseNetOfTax	15287000
CY2020Q4	onto	Employee Stock Purchase Plan Available EmployeeStockPurchasePlanAvailable	1500000
CY2022	us-gaap	Allocated Share Based Compensation Expense AllocatedShareBasedCompensationExpense	19542000
CY2020	us-gaap	Allocated Share Based Compensation Expense Net Of Tax AllocatedShareBasedCompensationExpenseNetOfTax	13813000
CY2019	us-gaap	Allocated Share Based Compensation Expense Net Of Tax AllocatedShareBasedCompensationExpenseNetOfTax	8302000
CY2022	onto	Effect On Earnings Per Share Basic EffectOnEarningsPerShareBasic	-0.31
CY2020	onto	Effect On Earnings Per Share Basic EffectOnEarningsPerShareBasic	-0.28
CY2019	onto	Effect On Earnings Per Share Basic EffectOnEarningsPerShareBasic	-0.28
CY2022	onto	Effect On Earnings Per Share Diluted EffectOnEarningsPerShareDiluted	-0.31
CY2020	onto	Effect On Earnings Per Share Diluted EffectOnEarningsPerShareDiluted	-0.28
CY2019	onto	Effect On Earnings Per Share Diluted EffectOnEarningsPerShareDiluted	-0.28
CY2022	onto	Number Of Trading Days For Closing Stock Price Performance Or Market Price Performance NumberOfTradingDaysForClosingStockPricePerformanceOrMarketPricePerformance	20
CY2022Q1	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Nonvested Number ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber	765000
CY2022	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Grants In Period Gross ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross	0
CY2020	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Grants In Period Gross ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross	0
CY2019	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Grants In Period Gross ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross	0
CY2022Q1	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Outstanding Number ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber	2000
CY2022Q1	us-gaap	Sharebased Compensation Shares Authorized Under Stock Option Plans Exercise Price Range Outstanding Options Weighted Average Exercise Price Beginning Balance1 SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageExercisePriceBeginningBalance1	15.20
CY2022Q1	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Outstanding Intrinsic Value ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue	191000
CY2022Q1	us-gaap	Sharebased Compensation Arrangement By Sharebased Payment Award Options Exercisable Intrinsic Value1 SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1	191000
CY2022	us-gaap	Sharebased Compensation Arrangement By Sharebased Payment Award Expiration Period SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod	P1Y
CY2022	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Exercises In Period Total Intrinsic Value ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue	1365000
CY2020	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Exercises In Period Total Intrinsic Value ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue	420000
CY2019	us-gaap	Share Based Compensation Arrangement By Share Based Payment Award Options Exercises In Period Total Intrinsic Value ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue	51000
CY2022	onto	Contribution Plan Employee Percentage ContributionPlanEmployeePercentage	1
CY2022	us-gaap	Defined Contribution Plan Maximum Annual Contributions Per Employee Percent DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent	0.50
CY2022	us-gaap	Defined Contribution Plan Cost Recognized DefinedContributionPlanCostRecognized	2544000
CY2020	us-gaap	Defined Contribution Plan Cost Recognized DefinedContributionPlanCostRecognized	2315000
CY2019	us-gaap	Defined Contribution Plan Cost Recognized DefinedContributionPlanCostRecognized	1317000
CY2022	us-gaap	Foreign Currency Transaction Gain Loss Before Tax ForeignCurrencyTransactionGainLossBeforeTax	-2020000
CY2020	us-gaap	Foreign Currency Transaction Gain Loss Before Tax ForeignCurrencyTransactionGainLossBeforeTax	-3070000
CY2019	us-gaap	Foreign Currency Transaction Gain Loss Before Tax ForeignCurrencyTransactionGainLossBeforeTax	676000
CY2022	onto	Other Expense Income OtherExpenseIncome	132000
CY2020	onto	Other Expense Income OtherExpenseIncome	362000
CY2019	onto	Other Expense Income OtherExpenseIncome	104000
CY2022	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	-1888000
CY2020	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	-2708000
CY2019	us-gaap	Other Nonoperating Income Expense OtherNonoperatingIncomeExpense	780000
CY2022	us-gaap	Current Federal Tax Expense Benefit CurrentFederalTaxExpenseBenefit	21791000
CY2020	us-gaap	Current Federal Tax Expense Benefit CurrentFederalTaxExpenseBenefit	1466000
CY2019	us-gaap	Current Federal Tax Expense Benefit CurrentFederalTaxExpenseBenefit	-27000
CY2022	us-gaap	Current State And Local Tax Expense Benefit CurrentStateAndLocalTaxExpenseBenefit	1007000
CY2020	us-gaap	Current State And Local Tax Expense Benefit CurrentStateAndLocalTaxExpenseBenefit	371000
CY2019	us-gaap	Current State And Local Tax Expense Benefit CurrentStateAndLocalTaxExpenseBenefit	88000
CY2022	us-gaap	Current Foreign Tax Expense Benefit CurrentForeignTaxExpenseBenefit	3153000
CY2020	us-gaap	Current Foreign Tax Expense Benefit CurrentForeignTaxExpenseBenefit	5637000
CY2019	us-gaap	Current Foreign Tax Expense Benefit CurrentForeignTaxExpenseBenefit	1548000
CY2022	us-gaap	Current Income Tax Expense Benefit CurrentIncomeTaxExpenseBenefit	25951000
CY2020	us-gaap	Current Income Tax Expense Benefit CurrentIncomeTaxExpenseBenefit	7474000
CY2019	us-gaap	Current Income Tax Expense Benefit CurrentIncomeTaxExpenseBenefit	1609000
CY2022	us-gaap	Deferred Federal Income Tax Expense Benefit DeferredFederalIncomeTaxExpenseBenefit	-9475000
CY2020	us-gaap	Deferred Federal Income Tax Expense Benefit DeferredFederalIncomeTaxExpenseBenefit	-10355000
CY2019	us-gaap	Deferred Federal Income Tax Expense Benefit DeferredFederalIncomeTaxExpenseBenefit	-4730000
CY2022	us-gaap	Deferred State And Local Income Tax Expense Benefit DeferredStateAndLocalIncomeTaxExpenseBenefit	-540000
CY2020	us-gaap	Deferred State And Local Income Tax Expense Benefit DeferredStateAndLocalIncomeTaxExpenseBenefit	-1036000
CY2019	us-gaap	Deferred State And Local Income Tax Expense Benefit DeferredStateAndLocalIncomeTaxExpenseBenefit	506000
CY2022	us-gaap	Deferred Foreign Income Tax Expense Benefit DeferredForeignIncomeTaxExpenseBenefit	-2603000
CY2020	us-gaap	Deferred Foreign Income Tax Expense Benefit DeferredForeignIncomeTaxExpenseBenefit	-240000
CY2019	us-gaap	Deferred Foreign Income Tax Expense Benefit DeferredForeignIncomeTaxExpenseBenefit	108000
CY2022	us-gaap	Deferred Income Tax Expense Benefit DeferredIncomeTaxExpenseBenefit	-12618000
CY2020	us-gaap	Deferred Income Tax Expense Benefit DeferredIncomeTaxExpenseBenefit	-11631000
CY2019	us-gaap	Deferred Income Tax Expense Benefit DeferredIncomeTaxExpenseBenefit	-4116000
CY2022	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	13333000
CY2020	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	-4157000
CY2019	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	-2507000
CY2022	us-gaap	Income Loss From Continuing Operations Before Income Taxes Domestic IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic	136143000
CY2020	us-gaap	Income Loss From Continuing Operations Before Income Taxes Domestic IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic	-120000
CY2019	us-gaap	Income Loss From Continuing Operations Before Income Taxes Domestic IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic	-7087000
CY2022	us-gaap	Income Loss From Continuing Operations Before Income Taxes Foreign IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign	19539000
CY2020	us-gaap	Income Loss From Continuing Operations Before Income Taxes Foreign IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign	26988000
CY2019	us-gaap	Income Loss From Continuing Operations Before Income Taxes Foreign IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign	6490000
CY2022	us-gaap	Effective Income Tax Rate Reconciliation At Federal Statutory Income Tax Rate EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate	0.21
CY2020	us-gaap	Effective Income Tax Rate Reconciliation At Federal Statutory Income Tax Rate EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate	0.21
CY2019	us-gaap	Effective Income Tax Rate Reconciliation At Federal Statutory Income Tax Rate EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate	0.21
CY2022	us-gaap	Income Tax Reconciliation Income Tax Expense Benefit At Federal Statutory Income Tax Rate IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate	32693000
CY2020	us-gaap	Income Tax Reconciliation Income Tax Expense Benefit At Federal Statutory Income Tax Rate IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate	5642000
CY2019	us-gaap	Income Tax Reconciliation Income Tax Expense Benefit At Federal Statutory Income Tax Rate IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate	-125000
CY2022	us-gaap	Income Tax Reconciliation State And Local Income Taxes IncomeTaxReconciliationStateAndLocalIncomeTaxes	1066000
CY2020	us-gaap	Income Tax Reconciliation State And Local Income Taxes IncomeTaxReconciliationStateAndLocalIncomeTaxes	126000
CY2019	us-gaap	Income Tax Reconciliation State And Local Income Taxes IncomeTaxReconciliationStateAndLocalIncomeTaxes	113000
CY2022	us-gaap	Income Tax Reconciliation Foreign Income Tax Rate Differential IncomeTaxReconciliationForeignIncomeTaxRateDifferential	-3817000
CY2020	us-gaap	Income Tax Reconciliation Foreign Income Tax Rate Differential IncomeTaxReconciliationForeignIncomeTaxRateDifferential	596000
CY2019	us-gaap	Income Tax Reconciliation Foreign Income Tax Rate Differential IncomeTaxReconciliationForeignIncomeTaxRateDifferential	-1277000
CY2022	onto	Foreign Derived Intangible Income Deduction ForeignDerivedIntangibleIncomeDeduction	11061000
CY2020	onto	Foreign Derived Intangible Income Deduction ForeignDerivedIntangibleIncomeDeduction	4262000
CY2019	onto	Foreign Derived Intangible Income Deduction ForeignDerivedIntangibleIncomeDeduction	2278000
CY2022	onto	Global Intangible Low Taxes Income Inclusion GlobalIntangibleLowTaxesIncomeInclusion	-1721000
CY2020	onto	Global Intangible Low Taxes Income Inclusion GlobalIntangibleLowTaxesIncomeInclusion	-2013000
CY2019	onto	Global Intangible Low Taxes Income Inclusion GlobalIntangibleLowTaxesIncomeInclusion	-1786000
CY2022	us-gaap	Income Tax Reconciliation Nondeductible Expense Share Based Compensation Cost IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost	689000
CY2020	us-gaap	Income Tax Reconciliation Nondeductible Expense Share Based Compensation Cost IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost	213000
CY2019	us-gaap	Income Tax Reconciliation Nondeductible Expense Share Based Compensation Cost IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost	826000
CY2022	us-gaap	Income Tax Reconciliation Tax Credits Research IncomeTaxReconciliationTaxCreditsResearch	3607000
CY2020	us-gaap	Income Tax Reconciliation Tax Credits Research IncomeTaxReconciliationTaxCreditsResearch	4858000
CY2019	us-gaap	Income Tax Reconciliation Tax Credits Research IncomeTaxReconciliationTaxCreditsResearch	2126000
CY2022	onto	Tax Impact Of Audit And Statue Closures TaxImpactOfAuditAndStatueClosures	-1987000
CY2020	onto	Tax Impact Of Audit And Statue Closures TaxImpactOfAuditAndStatueClosures	-2905000
CY2022	onto	Tax Impact Of Cares Act TaxImpactOfCARESAct	-732000
CY2020	onto	Tax Impact Of Cares Act TaxImpactOfCARESAct	-1141000
CY2022	us-gaap	Income Tax Reconciliation Other Adjustments IncomeTaxReconciliationOtherAdjustments	-1632000
CY2020	us-gaap	Income Tax Reconciliation Other Adjustments IncomeTaxReconciliationOtherAdjustments	419000
CY2019	us-gaap	Income Tax Reconciliation Other Adjustments IncomeTaxReconciliationOtherAdjustments	574000
CY2020	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	-4157000
CY2019	us-gaap	Income Tax Expense Benefit IncomeTaxExpenseBenefit	-2507000
CY2022	us-gaap	Effective Income Tax Rate Continuing Operations EffectiveIncomeTaxRateContinuingOperations	0.09
CY2020	us-gaap	Effective Income Tax Rate Continuing Operations EffectiveIncomeTaxRateContinuingOperations	-0.16
CY2019	us-gaap	Effective Income Tax Rate Continuing Operations EffectiveIncomeTaxRateContinuingOperations	-4.20
CY2022Q1	us-gaap	Deferred Tax Assets Tax Deferred Expense Reserves And Accruals DeferredTaxAssetsTaxDeferredExpenseReservesAndAccruals	15084000
CY2020Q4	us-gaap	Deferred Tax Assets Tax Deferred Expense Reserves And Accruals DeferredTaxAssetsTaxDeferredExpenseReservesAndAccruals	13874000
CY2022Q1	onto	Deferred Tax Assets Tax Deferred Expense Deferred Revenue DeferredTaxAssetsTaxDeferredExpenseDeferredRevenue	4729000
CY2020Q4	onto	Deferred Tax Assets Tax Deferred Expense Deferred Revenue DeferredTaxAssetsTaxDeferredExpenseDeferredRevenue	1648000
CY2022Q1	us-gaap	Deferred Tax Assets Tax Deferred Expense Compensation And Benefits Share Based Compensation Cost DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost	3023000
CY2020Q4	us-gaap	Deferred Tax Assets Tax Deferred Expense Compensation And Benefits Share Based Compensation Cost DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost	2556000
CY2022Q1	us-gaap	Deferred Tax Assets Tax Credit Carryforwards DeferredTaxAssetsTaxCreditCarryforwards	10339000
CY2020Q4	us-gaap	Deferred Tax Assets Tax Credit Carryforwards DeferredTaxAssetsTaxCreditCarryforwards	10801000
CY2022Q1	us-gaap	Deferred Tax Assets Operating Loss Carryforwards DeferredTaxAssetsOperatingLossCarryforwards	3254000
CY2020Q4	us-gaap	Deferred Tax Assets Operating Loss Carryforwards DeferredTaxAssetsOperatingLossCarryforwards	4849000
CY2022Q1	onto	Deferred Tax Assets Depreciation And Amortization DeferredTaxAssetsDepreciationAndAmortization	368000
CY2020Q4	onto	Deferred Tax Assets Depreciation And Amortization DeferredTaxAssetsDepreciationAndAmortization	687000
CY2022Q1	onto	Deferred Tax Assets Operating Lease Liabilities DeferredTaxAssetsOperatingLeaseLiabilities	3575000
CY2020Q4	onto	Deferred Tax Assets Operating Lease Liabilities DeferredTaxAssetsOperatingLeaseLiabilities	4261000
CY2022Q1	us-gaap	Deferred Tax Assets Other DeferredTaxAssetsOther	2364000
CY2020Q4	us-gaap	Deferred Tax Assets Other DeferredTaxAssetsOther	1877000
CY2022Q1	us-gaap	Deferred Tax Assets Gross DeferredTaxAssetsGross	42736000
CY2020Q4	us-gaap	Deferred Tax Assets Gross DeferredTaxAssetsGross	40553000
CY2022Q1	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	10948000
CY2020Q4	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	14238000
CY2022Q1	us-gaap	Deferred Tax Assets Net DeferredTaxAssetsNet	31788000
CY2020Q4	us-gaap	Deferred Tax Assets Net DeferredTaxAssetsNet	26315000
CY2022Q1	onto	Deferred Tax Liabilities Depreciation And Amortization DeferredTaxLiabilitiesDepreciationAndAmortization	63554000
CY2020Q4	onto	Deferred Tax Liabilities Depreciation And Amortization DeferredTaxLiabilitiesDepreciationAndAmortization	75608000
CY2022Q1	onto	Deferred Tax Liabilities Operating Lease Right Of Use Assets DeferredTaxLiabilitiesOperatingLeaseRightOfUseAssets	3469000
CY2020Q4	onto	Deferred Tax Liabilities Operating Lease Right Of Use Assets DeferredTaxLiabilitiesOperatingLeaseRightOfUseAssets	3960000
CY2022Q1	us-gaap	Deferred Tax Liabilities Other DeferredTaxLiabilitiesOther	224000
CY2020Q4	us-gaap	Deferred Tax Liabilities Other DeferredTaxLiabilitiesOther	135000
CY2022Q1	us-gaap	Deferred Income Tax Liabilities DeferredIncomeTaxLiabilities	67247000
CY2020Q4	us-gaap	Deferred Income Tax Liabilities DeferredIncomeTaxLiabilities	79703000
CY2022Q1	us-gaap	Deferred Tax Liabilities DeferredTaxLiabilities	35459000
CY2020Q4	us-gaap	Deferred Tax Liabilities DeferredTaxLiabilities	53388000
CY2022Q1	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	10948000
CY2020Q4	us-gaap	Deferred Tax Assets Valuation Allowance DeferredTaxAssetsValuationAllowance	14238000
CY2020Q4	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	13486000
CY2019Q4	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	15143000
CY2018Q4	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	5528000
CY2022	us-gaap	Unrecognized Tax Benefits Increases Resulting From Prior Period Tax Positions UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions	156000
CY2020	us-gaap	Unrecognized Tax Benefits Increases Resulting From Prior Period Tax Positions UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions	347000
CY2019	us-gaap	Unrecognized Tax Benefits Increases Resulting From Prior Period Tax Positions UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions	9989000
CY2022	us-gaap	Unrecognized Tax Benefits Decreases Resulting From Prior Period Tax Positions UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions	204000
CY2019	us-gaap	Unrecognized Tax Benefits Decreases Resulting From Prior Period Tax Positions UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions	932000
CY2022	us-gaap	Unrecognized Tax Benefits Increases Resulting From Current Period Tax Positions UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions	1193000
CY2020	us-gaap	Unrecognized Tax Benefits Increases Resulting From Current Period Tax Positions UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions	1048000
CY2019	us-gaap	Unrecognized Tax Benefits Increases Resulting From Current Period Tax Positions UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions	558000
CY2022	us-gaap	Unrecognized Tax Benefits Reductions Resulting From Lapse Of Applicable Statute Of Limitations UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations	2258000
CY2020	us-gaap	Unrecognized Tax Benefits Reductions Resulting From Lapse Of Applicable Statute Of Limitations UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations	3052000
CY2022Q1	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	12373000
CY2020Q4	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	13486000
CY2019Q4	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	15143000
CY2022Q1	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	12373000
CY2020Q4	us-gaap	Unrecognized Tax Benefits UnrecognizedTaxBenefits	13486000
CY2022Q1	us-gaap	Unrecognized Tax Benefits That Would Impact Effective Tax Rate UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate	7832000
CY2020Q4	us-gaap	Unrecognized Tax Benefits That Would Impact Effective Tax Rate UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate	8863000
CY2022	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Expense UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense	-814000
CY2020	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Expense UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense	-193000
CY2019	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Expense UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense	236000
CY2022Q1	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Accrued UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued	430000
CY2020Q4	us-gaap	Unrecognized Tax Benefits Income Tax Penalties And Interest Accrued UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued	1487000
CY2022	us-gaap	Number Of Reportable Segments NumberOfReportableSegments	1
CY2022	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	788899000
CY2020	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	556496000
CY2019	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	305896000
CY2022	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	788899000
CY2020	us-gaap	Revenue From Contract With Customer Excluding Assessed Tax RevenueFromContractWithCustomerExcludingAssessedTax	556496000
CY2020	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	0.63
CY2019	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	0.06
CY2022	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	2.89
CY2020	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	0.63
CY2019	us-gaap	Earnings Per Share Basic EarningsPerShareBasic	0.06
CY2022	us-gaap	Earnings Per Share Diluted EarningsPerShareDiluted	2.86
CY2022	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	49242000
CY2020	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	49136000
CY2019	us-gaap	Weighted Average Number Of Shares Outstanding Basic WeightedAverageNumberOfSharesOutstandingBasic	29729000
CY2022	us-gaap	Weighted Average Number Diluted Shares Outstanding Adjustment WeightedAverageNumberDilutedSharesOutstandingAdjustment	486000
CY2020	us-gaap	Weighted Average Number Diluted Shares Outstanding Adjustment WeightedAverageNumberDilutedSharesOutstandingAdjustment	339000
CY2019	us-gaap	Weighted Average Number Diluted Shares Outstanding Adjustment WeightedAverageNumberDilutedSharesOutstandingAdjustment	278000
CY2022	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	49728000
CY2020	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	49475000
CY2019	us-gaap	Weighted Average Number Of Diluted Shares Outstanding WeightedAverageNumberOfDilutedSharesOutstanding	30007000
CY2022	us-gaap	Net Income Loss NetIncomeLoss	142349000
CY2020	us-gaap	Net Income Loss NetIncomeLoss	31025000
CY2019	us-gaap	Net Income Loss NetIncomeLoss	1910000
CY2022Q1	us-gaap	Stock Repurchase Program Remaining Authorized Repurchase Amount1 StockRepurchaseProgramRemainingAuthorizedRepurchaseAmount1	100000000
CY2020	us-gaap	Stock Repurchased And Retired During Period Shares StockRepurchasedAndRetiredDuringPeriodShares	1882000
CY2019	us-gaap	Stock Repurchased And Retired During Period Shares StockRepurchasedAndRetiredDuringPeriodShares	37000
CY2020	us-gaap	Stock Repurchased And Retired During Period Value StockRepurchasedAndRetiredDuringPeriodValue	52000000
CY2019	us-gaap	Stock Repurchased And Retired During Period Value StockRepurchasedAndRetiredDuringPeriodValue	744000
CY2020	onto	Stock Repurchased And Retired Average Price Per Share StockRepurchasedAndRetiredAveragePricePerShare	27.62
CY2019	onto	Stock Repurchased And Retired Average Price Per Share StockRepurchasedAndRetiredAveragePricePerShare	19.85

Files In Submission

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$ONTO
ONTO INNOVATION INC. Stock $onto

2022 Q1 Form 10-K Financial Statement

#000156459022006948 Filed on February 25, 2022

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Facts In Submission

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$ONTO ONTO INNOVATION INC. Stock $onto

2022 Q1 Form 10-K Financial Statement

#000156459022006948 Filed on February 25, 2022

Income Statement

Balance Sheet

Cashflow Statement

Facts In Submission

Files In Submission

$ONTO
ONTO INNOVATION INC. Stock $onto