| Filed On | Filing |
|---|---|
| 14 Jan 2002 | ANNUAL REPORT FOR YEAR ENDING 09-30-2001 |
| 22 Dec 2000 | AMTECH SYSTEMS, INC. |
| 23 Dec 1999 | ANNUAL REPORT FOR THE YEAR ENDED 9/30/99 |
| 24 Dec 1998 | FORM 10-K OF AMTECH SYSTEMS, INC. FTYE 9/30/98 |
| 29 Dec 1997 | ANNUAL REPORT |
| 30 Dec 1996 | ANNUAL REPORT |
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