| Filed On | Filing |
|---|---|
| 14 May 2024 | SC 13D/A |
| 24 Feb 2022 | SC 13D/A |
| 18 Feb 2021 | SC 13D/A |
| 30 Jan 2020 | SC 13D/A |
| 27 Nov 2018 | SCHEDULE 13D AMENDMENT NO. 4 |
| 17 Jul 2018 | SCHEDULE 13D AMENDMENT NO. 3 |
| 18 Dec 2017 | SCHEDULE 13D AMENDMENT NO. 2 |
| 24 Aug 2017 | SCHEDULE 13D AMENDMENT NO. 1 |
| 18 Mar 2016 | SCHEDULE 13D/A |
| 31 Jan 2011 | SC 13D/A |
| 28 Sep 2010 | SC 13D/A |
| 08 Sep 2010 | SC 13D/A |
| 08 Sep 2010 | SC 13D/A |
| 20 Feb 2009 | SC 13D/A |
| 30 Sep 2008 | AMTECH SYSTEMS, INC. - FORM SC 13D/A RICHARD L. SCOTT |
| 03 Oct 2007 | AMTECH SYSTEMS, INC. - FORM SC 13D/A RICHARD L. SCOTT |
| 17 Jul 2007 | AMTECH SYSTEMS, INC. - FORM SC 13D/A RICHARD L. SCOTT |
| 16 Feb 2007 | AMTECH SYSTEMS, INC. |
| 12 Feb 2007 | SC 13D/A |
| 27 Dec 2006 | SC 13D/A |
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