| Filed On | Filing |
|---|---|
| 11 Dec 2019 | SC 13D |
| 25 Nov 2019 | SCHEDULE 13D |
| 25 Jan 2016 | SCHEDULE 13D |
| 09 Feb 2015 | SCHEDULE 13D |
| 28 Jul 2008 | AMTECH SYSTEMS, INC. - FORM SC 13D RICHARD L. SCOTT |
| 01 Jun 2005 | SC 13D |
| 09 May 2005 | SC 13D |
| 02 May 2005 | AMTECH SYSTEMS, INC. |
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