| Filed On | Filing |
|---|---|
| 13 Mar 2026 | S-3 |
| 18 Jan 2017 | S-3 |
| 12 Aug 2011 | FORM S-3 |
| 08 Feb 2011 | REGISTRATION STATEMENT FOR SPECIFIED TRANSACTIONS BY CERTAIN ISSUERS |
| 13 Jan 2006 | FORM S-3 |
| 02 Oct 2000 | FORM S-3 OF AMTECH SYSTEMS, INC. |
| 14 Aug 1996 | FORM S-3 |
| 09 Aug 1996 | FORM S-3 |
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